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Preparation method of hafnium oxide powder with nano-porous structure

A nano-pore structure, hafnium oxide technology, applied in the field of nano-powder materials, can solve the problems of poor thermal stability of hafnium dioxide, irregular changes in pore size, underdeveloped pores, etc., and achieves high dispersion, simple operation, and large ratio. The effect of surface area

Inactive Publication Date: 2010-09-08
SHANDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, conventional hafnium dioxide has poor thermal stability, small specific surface, underdeveloped pores, and irregular pore size changes, which limit its excellent performance.

Method used

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  • Preparation method of hafnium oxide powder with nano-porous structure
  • Preparation method of hafnium oxide powder with nano-porous structure
  • Preparation method of hafnium oxide powder with nano-porous structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0012] Using hafnium tetrachloride and benzoic acid as raw materials, mix them at a molar ratio of 1:2, ball mill them evenly, and then calcinate at 700°C for 2 hours to obtain hafnium oxide powder with a nanoporous structure.

[0013] By XRD test, it can be seen that the powder crystal type is a monoclinic phase (see figure 1 ); through SEM testing, it can be seen that the hafnium oxide powder has a three-dimensional network, the pore size is 50-100nm, and the skeleton particles are 20-100nm (see figure 2 ).

Embodiment 2

[0015] Using hafnium tetrachloride and benzoic acid as raw materials, mix them at a molar ratio of 1:3, ball mill them evenly, and then calcinate at 500°C for 2 hours to obtain hafnium oxide powder with a nanoporous structure.

Embodiment 3

[0017] Using hafnium tetrachloride and benzoic acid as raw materials, mix them at a molar ratio of 1:4, ball mill them evenly, and then calcinate at 800°C for 2 hours to obtain hafnium oxide powder with a nanoporous structure.

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Abstract

The invention provides a preparation method of hafnium oxide powder with a nano-porous structure, which belongs to the field of nano-powder materials. The preparation method is characterized by adopting the solid phase method, taking hafnium tetrachloride and benzoic acid as raw materials, mixing the two according to the molar ratio of 1:2-4, carrying out uniform ball milling, then calcining for 2h at the temperature of 500-800 DEG C and finally obtaining the hafnium oxide powder with the nano-porous structure, wherein the pore size is 50-100nm, and the particle size of the hafnium oxide is 20-100nm. The preparation method has the advantages of simple process, safe operation and high efficiency, and the synthesized nano-hafnium oxide powder has larger specific surface area.

Description

technical field [0001] The invention provides a preparation method of hafnium oxide powder with a nano-pore structure, which belongs to the field of nano-powder materials. Background technique [0002] At present, hafnium oxide materials have been used in fast ion conductor fuel cells, oxygen sensors, infrared window protective films, control rods of atomic reactors, catalysts and other fields. where HfO 2 Sputtered thin films are considered to be the most effective because of their high dielectric constant, high dielectric strength, low dielectric loss, low leakage current, good capacitance-voltage characteristics, good stability, and firm combination with substrate silicon. One of the promising new insulating dielectric films. When hafnium dioxide is used as a catalyst, if it is endowed with a developed pore structure, it will not only facilitate the transfer of charges between phases and improve its charge conduction performance, but also reduce the diffusion resistance...

Claims

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Application Information

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IPC IPC(8): C01G27/02
Inventor 魏春城田贵山冯柳孟凡涛周立娟
Owner SHANDONG UNIV OF TECH
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