Light-addressable potentiometric sensor for monitoring isolated mouse heart
A potentiometric sensor and optical addressing technology, applied in the field of biosensors, can solve the problems of difficult processing and packaging, poor mechanical strength, and opacity to the heart, and achieve the effects of rapid packaging, improved sensitivity, and high sensitivity
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[0021] (1) Preparation of sensor chip
[0022] In the present invention, an n-type silicon wafer is selected as the base material, and photolithography and wet etching are performed after chemical cleaning to thin the central circular area on the back of the silicon base. After the thinning is completed, the silicon wafer is oxidized to form silicon dioxide, and then silicon nitride is deposited by PECVD. Etching to remove SiO on the back of the silicon wafer 2 / Si 3 N 4 Finally, metal was sputtered on the back side and the thinned area was removed by etching as the working electrode 3, and the prepared photo-addressable potential sensor chip was divided into small squares as experimental units. exist figure 2 In the shown embodiment, the thickness of the silicon substrate usually selected is 400-500 μm, and the resistivity is generally selected at about 10 Ω·cm. The size of the prepared single sensor chip 10 can be 1 cm × 1 cm, and nitrogen Silicon oxide layer 6 (insula...
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