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Dual testing room measured material outgassing rate measuring device and method

A test chamber and double test technology, applied in the preparation of test samples, analytical materials, instruments, etc., can solve problems such as inability to eliminate influence and complex structure, and achieve the effect of improving vacuum degree, facilitating baking, and eliminating influence

Active Publication Date: 2011-02-16
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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Problems solved by technology

Therefore, this method uses two sets of pumping systems, the structure is completely symmetrical, and the structure is complex. Strictly speaking, the background of the vacuum chamber where the sample is placed is not exactly the same as the background of the vacuum chamber where the sample is not placed, and can only be measured approximately The background in the vacuum chamber cannot eliminate the influence of the x-ray effect of the measuring gauge itself and the desorption effect of electron excitation

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  • Dual testing room measured material outgassing rate measuring device and method
  • Dual testing room measured material outgassing rate measuring device and method

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Embodiment Construction

[0043] Below in conjunction with accompanying drawing of description, the present invention is described in detail:

[0044] The device of double testing room of the present invention to measure material outgassing rate is as figure 1 As shown, it includes a high vacuum chamber 12, a symmetrical test chamber A8 and a test chamber B9, an ultra-high vacuum chamber 2, a separation gauge 7, ultra-high vacuum angle valves 5, 6, two straight-through valves 10 and 11, and a bimolecular pump Gas system 1, the interface is all sealed with metal, which is resistant to high temperature baking. The bimolecular pump pumping system 1 is directly connected to the ultra-high vacuum chamber 2; the ultra-high vacuum chamber 2 communicates with two symmetrical test chambers A8 and B9 respectively through small holes, and the diameter of the small holes is 8.1mm. The design can make the flow conductance of the small hole 6L / s; the separation gauge 7 is bridged on the ultra-high vacuum chamber 2 ...

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Abstract

The invention discloses dual testing room measured material outgassing rate measuring device and method, belonging to the field of vacuum measurement. Symmetric structures of testing rooms are utilized in the device, an extractor guage is in bridge connection at two sides of a small hole, and the backgrounds in the testing rooms are tested in real time by changing flow passages of gas. The methodcomprises the following steps: putting a sample in a high vacuum chamber, baking and degassing while exhausting gas, introducing gas released by the sample in the testing rooms, measuring the pressure difference of two sides of the small hole in a dynamic balance state and obtaining the total outgassing amount through the known conductance of the small hole; introducing the gas released by the sample to the testing rooms, measuring the pressure in the testing rooms and an ultrahigh vacuum chamber in a dynamic balance state, and obtaining the outgassing amount in the testing rooms through the known conductance of the small hole; taking out the sample and obtaining outgassing amount by subtracting each other. The method has convenient operation, measures the backgrounds in the testing roomsin real time and is beneficial to enhancing the measuring accuracy.

Description

technical field [0001] The invention relates to a device and method for measuring the outgassing rate of materials with double test chambers. The symmetrical double test chambers are used to measure the outgassing volume produced by the test chamber and a separation gauge, which belongs to the field of vacuum measurement. Background technique [0002] The document "Modification of the outgassing rate of stainless steel surface by plasmaimmersion ion implantation surface and coating technology 93(1977) 318-326" introduced a method of measuring the outgassing amount of the test chamber using a symmetrical structure. This method uses a completely symmetrical test system, one of which has a built-in sample, and uses the fixed conductance method to measure the outgassing of the sample, and the other test system does not place a sample, and uses the fixed conductance method to measure the outgassing of the sample. Gas volume, subtracted to get the outgassing volume of the sample, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N7/16G01N1/44
Inventor 冯焱李得天张涤新郭美如曾祥坡卢耀文
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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