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Method for preparing textured ZnO transparent conductive coated glass

A coated glass, transparent and conductive technology, applied in the field of thin film solar photovoltaic cells and building integrated photovoltaics, glass processing, can solve the problems of reducing the performance of silicon thin film solar photovoltaic cells, toxic FTO films, air pollution, etc., to reduce complexity, Effect of avoiding pollution and increasing absorption

Inactive Publication Date: 2010-02-24
JIANGSU XIUQIANG GLASSWORK CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, FTO films are toxic, expensive, and costly, and the waste gas formed in the industrial production process will cause air pollution; especially when depositing silicon films, Sn 4+ It is easily reduced by hydrogen plasma, which reduces the performance of silicon thin film solar photovoltaic cells and limits its use in silicon thin film solar cells

Method used

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  • Method for preparing textured ZnO transparent conductive coated glass

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Embodiment 1: High-purity argon is used as the working gas for sputtering coating.

[0024] 1) At first, the suede glass substrate to be coated is cleaned and dried;

[0025] 2) Put the dry and clean suede glass substrate on the back and the vacuum is ≤2.5×10 -3 pa vacuum chamber.

[0026] 3) Under the high-purity argon atmosphere of 0.35Pa, SiO with a film thickness of 30nm is coated on the suede surface of the substrate glass 2 Isolate the transition layer.

[0027] 4) Under the high-purity argon atmosphere of 0.35Pa, in SiO 2 The ZnO thin film is sputtered on the isolation transition layer; or the ZnO thin film is directly deposited on the suede surface of the glass by magnetron sputtering.

[0028] The properties of the obtained textured ZnO transparent conductive coated glass are as follows: the thickness of the textured ZnO film is 450nm, the total visible light transmittance is 87%, the texture is 38%, and the sheet resistance is 19.8Ω / □.

Embodiment 2

[0029] Embodiment 2: High-purity argon is used as the working gas for sputtering coating.

[0030] 1) at first the suede glass substrate to be coated is cleaned and dried;

[0031] 2) Put the dry and clean suede glass substrate on the back and the vacuum is ≤2.5×10 -3 Pa's vacuum chamber.

[0032] 3) In a high-purity argon atmosphere of 0.35Pa, coat SiO on the suede surface of the substrate glass 2 The transition layer is isolated with a film thickness of 40nm.

[0033] 4) In a high-purity argon environment of 0.40Pa, the SiO 2 The ZnO thin film is sputtered on the isolation transition layer; or the ZnO thin film is directly deposited on the suede surface of the glass by magnetron sputtering.

[0034] The properties of the obtained textured ZnO transparent conductive coated glass are as follows: the thickness of the textured ZnO film is 550nm, the total visible light transmittance is 85%, the texture is 35%, and the sheet resistance is 17.2Ω / □.

Embodiment 3

[0035] Embodiment 3: High-purity argon is used as the working gas for sputtering coating.

[0036] 1) at first the suede glass substrate to be coated is cleaned and dried;

[0037] 2) Put the dry and clean suede glass substrate on the back and the vacuum is ≤2.5×10 -3 pa vacuum chamber.

[0038] 3) In a high-purity argon atmosphere of 0.40Pa, coat SiO on the suede surface of the substrate glass 2 Isolate the transition layer with a film thickness of 50nm.

[0039] 4) In the high-purity argon environment of 0.45Pa, the SiO 2The ZnO thin film is sputtered on the isolation transition layer; or the ZnO thin film is directly deposited on the suede surface of the glass by magnetron sputtering.

[0040] The properties of the obtained textured ZnO transparent conductive coated glass are as follows: the thickness of the textured ZnO film is 650nm, the total transmittance of visible light is 84%, the texture is 32%, and the sheet resistance is 16Ω / □.

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Abstract

The invention discloses a method for preparing textured ZnO transparent conductive coated glass, belonging to the fields of glass finishing and silicon thin-film solar photovoltaic cells. The texturedZnO transparent conductive glass is a key material for realizing integration of photovoltaic buildings and is an important premise for improving the conversion rate of the silicon thin-film solar photovoltaic cells. In the invention, a ZnO transparent conductive coating film is prepared on the substrate of the textured glass, and the textured structure of the ZnO transparent conductive coated film is the same as that of the textured glass. The method comprises the following steps: 1) the textured glass prepared by a calendaring method is taken as glass substrates; 2) a SiO2 isolation transition layer is plated by magnetron sputtering on the surface of the textured glass, and a ZnO thin film is sputtered and precipitated on the SiO2 isolation transition layer; and 3) the structure of the formed ZnO transparent conductive textured film is consistent with the structure of the substrate of the textured glass; the textured ZnO transparent conductive glass wool degree ranges from 10 to 40%,the total transmittance of the visible light is more than or equal to 82%, and a square resistance ranges from 8 to 20 omega / square.

Description

technical field [0001] The present invention specifically relates to a method for preparing a textured ZnO transparent conductive coated glass with a textured glass substrate, that is, using a magnetron sputtering method to deposit a ZnO film on the glass textured surface to obtain a textured surface consistent with the structure of the glass textured surface The invention discloses ZnO transparent conductive glass, which belongs to the fields of glass processing, thin-film solar photovoltaic cells and photovoltaic building integration. Background technique [0002] Transparent conductive coated glass is usually used in the front electrodes of thin-film solar cells, liquid crystal displays, and plasma displays, in which the glass-based oxide transparent conductive film with textured structure can reflect, refract and scatter the visible light incident on its surface, and disperse the light To all angles, thereby increasing the optical path of light in the absorbing layer of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/245C03C17/34
Inventor 赵青南董玉红卢秀强
Owner JIANGSU XIUQIANG GLASSWORK CO LTD
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