Pulse helium ionized gas phase chromatographic instrument

Abstract

The invention relates to a pulse helium ionized gas phase chromatographic instrument which comprises a gas carrying unit, a sampling unit, a gas path control unit, a circuit control unit, a separation unit and a test unit; the invention is characterized by further comprising a tail gas processing unit and a signal collection and data processing unit; the tail gas processing unit receives the waste gas discharged by the separation unit; the signal collection and data processing unit is a countercharge chromatograph workstation; the gas carrying unit is constructed by a solid state filter and a helium purifier to provide high purity carrying gas for the separation unit; the sampling unit is used for sampling and automatic sampling injection; the separation unit is comprises a switching procedure of three valves and four columns; the test unit is a pulse helium ionized tester. The stable path control and the circuit control parts of the invention can ensure the instrument to work for a long time and can show good response to all the impurities in the high purity gas, the measurement result can meet the gas standard requirement, the operation is simple and the whole process is in automatic control.

Description

technical field [0001] The invention relates to a pulse helium ionization gas chromatograph used in the field of high-purity gas and electronic industry gas detection. Background technique [0002] At present, there is no instrument in China that can measure all impurities at the same time for high-purity gases and electronic industry gases. Traditional gas chromatographs are equipped with reformer hydrogenation flame ionization detectors. Although they have high sensitivity, they can only measure carbon monoxide, carbon dioxide and hydrocarbons. Thermal conductivity detectors can measure inorganic components but their sensitivity is too low. In recent years, some instruments equipped with high-sensitivity detectors have also appeared, such as zirconia detectors, argon ion detectors, etc. Although the sensitivity is high, but because they are all selective, they can only detect a certain gas or have to be compared with The determination of all impurity components can only ...

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Problems solved by technology

[0004] GOW-MAC in the United States also produces a gas analyzer. The detector used is a DC helium ionization detector. Although it can meet the analysis requirements, it does not have sampling processing, tail gas processing and computer counter-control units, and the whole machine is expensive. At present, it is difficult to be widely accepted by domestic users

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