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Non-equilibrium magnetron-sputtering rare-earth multivariate graphite composite film and preparation method thereof

A magnetron sputtering and multi-component compounding technology, which is applied in the direction of sputtering plating, ion implantation plating, metal material coating technology, etc., can solve the problems of poor thermal stability and electrochemical corrosion resistance, and achieve electrochemical resistance Improved corrosion resistance and wear resistance, improved adhesion to base film, and easy handling

Active Publication Date: 2009-12-30
CSIC NO 12 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide an unbalanced magnetron sputtering rare earth multi-component graphite composite film, which solves the problems of poor thermal stability and electrochemical corrosion resistance of the existing unbalanced magnetron sputtering solid lubricating composite film

Method used

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  • Non-equilibrium magnetron-sputtering rare-earth multivariate graphite composite film and preparation method thereof
  • Non-equilibrium magnetron-sputtering rare-earth multivariate graphite composite film and preparation method thereof
  • Non-equilibrium magnetron-sputtering rare-earth multivariate graphite composite film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0092] Determine the composition of the composite film, wherein the Cr / RE transition layer 3 is composed of: Ce: 0.1%, Cr: 99.9% according to the mass percentage, and the C / Cr-RE multi-component composite layer 5 is composed of Cr: 3% according to the mass percentage , Ce: 0.3%, Zr: 0.3%, C: 96.4%.

[0093] Calculate the number of rare earth Ce inserts embedded on the high-purity chromium target, known S = 650cm 2 , α Ce / Cr =0.51,β Ce / Cr = 0.95, γ Ce =99.9%, A=0.1%, get S by formula (1) 1 =1.34cm 2 , when the insert diameter is Φ10mm, S 2 =0.785cm 2 , get n from formula (2) 1 = S 1 / S 2 = 1.7, rounded to 2 Ce inserts;

[0094] Calculate the number of rare earth Ce inlays embedded on the high-purity carbon target, and it is known that S=650cm 2 , α Ce / C =5,β Ce / C = 2.99, gamma Ce =99.9%, A=0.3%, get S by formula (1) 1 =0.13cm 2 , when the insert diameter is Φ4mm S 2 =0.126cm 2 , get n from formula (2) 2 = S 1 / S 2 = 1.03, rounded to 1 Ce insert;

[0095] Cal...

Embodiment 2

[0099] Determine the composition of the composite film, wherein, the Cr / RE transition layer 3 is composed of: Ce: 0.5%, Cr: 99.5%, and the C / Cr-Ce multi-component composite layer 5 is composed of: Cr: 15% according to the mass percentage , Ce: 5%, :Ta: 5%, C: 75%.

[0100] Calculate the number of rare earth Ce inserts embedded on the high-purity chromium target, known S = 650cm 2 , α Ce / Cr =0.51,β Ce / Cr = 0.95, γ Ce =99.9%, A=0.5%, get S by formula (1) 1 =6.72cm 2 , when the insert diameter is Φ17mm, S 2 =2.27cm 2 , get n from formula (2) 1 = S 1 / S 2 =2.96, rounded to 3 Ce inserts;

[0101] Calculate the number of rare earth Ce inlays embedded on the high-purity carbon target, and it is known that S=650cm 2 , α Ce / C =5,β Ce / C = 2.99, gamma Ce =99.9%, A=5%, get S by formula (1) 1 =2.18cm 2 , when the insert diameter is Φ8mm, S 2 =0.50cm 2 , get n from formula (2) 2 = S 1 / S 2 =4.36, rounded to 4 Ce inserts;

[0102] Calculate the number of metal Zr insert...

Embodiment 3

[0106] Determine the composition of the composite film, wherein the Cr / RE transition layer 3 is composed of: Ce: 1%, Cr: 99% according to the mass percentage, and the C / Cr-Ce multi-component composite layer 5 is composed of: Cr: 10% according to the mass percentage , Ce: 10%, Zr: 10%, C: 70%.

[0107] Calculate the number of rare earth Ce inserts embedded on the high-purity chromium target, known S = 650cm 2 , gamma Ce = 99.9%, α Ce / Cr =0.51,β Ce / Cr =0.95, A=0.5%, get S by formula (1) 1 =13.43cm 2 , when the insert diameter is Φ17mm, S 2 =2.27cm 2 , get n from formula (2) 1 = S 1 / S 2 =5.92, rounded to 6 Ce inserts;

[0108] Calculate the number of rare earth Ce inlays embedded on the high-purity carbon target, and it is known that S=650cm 2 , gamma Ce = 99.9%, α Ce / C =5,β Ce / C =2.99, A=10%, get S by formula (1) 1 =4.35cm 2 , when the insert diameter is Φ8mm, S 2 =0.50cm 2 , get n from formula (2) 2 = S 1 / S 2 =8.70, rounded to 8 Ce inserts;

[0109] Calc...

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Abstract

The invention discloses a non-equilibrium magnetron-sputtering rare-earth multi-element graphite composite film, which consists of an ion infiltrating metal layer, a Cr / RE transition layer, a C / Cr-RE gradient layer and a C / Cr-RE multi-element composite layer compounded in turn, wherein the components in percentage by mass of the Cr / RE transition layer are 0.1 to 1 percent of RE, and the balance of Cr; and the components in percentage by mass of the C / Cr-RE multi-element composite layer are 3 to 15 percent of Cr, 0.3 to 10 percent of RE, 0.3 to 10 percent of transition metal, and the balance of C. A method for preparing the non-equilibrium magnetron-sputtering rare-earth multi-element graphite composite film comprises the steps of first determining the components of the composite film, calculating the number of rare-earth insert blocks arranged on a high-purity chromium target and a high-purity carbon target, as well as the number of transition metal insert blocks on the high-purity carbon target, preparing and installing the corresponding insert blocks, performing magnetron sputtering and obtaining the composite film. The invention has the advantage of solving the problem that the prior non-equilibrium magnetron-sputtering solid-lubrication composite film is poor in thermal stability and resistance to electrochemical corrosion.

Description

technical field [0001] The invention belongs to the technical field of physical vapor deposition of thin film materials and modern surface engineering technology, and specifically relates to an unbalanced magnetron sputtering rare earth multi-element graphite composite film, and also relates to a preparation method of the rare-earth multi-element graphite composite film. Background technique [0002] Typical new solid lubricant composite films include MOST, Graphit-ic, WC-DLC-WS2, Dymon-iC and WC / a-C nanocomposite films, especially graphite-like composite films with good environmental adaptability have very broad application prospects. The Graphit-ic graphite-like composite film prepared by Teer Company has achieved good results by compounding a certain content of Cr element to adjust the plasticity and toughness of the graphite-like film, reduce internal stress, and improve the bearing capacity and wear resistance of the composite film. [0003] Due to the poor thermal stab...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16
Inventor 王佐平张镜斌陈鹏波何源孙长涛李海军
Owner CSIC NO 12 RES INST
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