Micro electromagnetic energy harvester and a preparation method

An energy harvester, electromagnetic technology, applied in the manufacture of inductors/transformers/magnets, circuits, permanent magnets, etc., can solve the problem of large device size, and achieve the effect of easy packaging, small size, and suitable for mass production

Inactive Publication Date: 2009-08-26
北京大学科技开发有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Glynne-Jones et al. in "An electromagnetic, vibration powered generator for intelligent sensor systems" (Sensors and actuators A, 2004, 110: 344-349) (Chinese title: "Electromagnetic vibration powered generator for intelligent sensor systems" , International Journal: Sensors and Actua...

Method used

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  • Micro electromagnetic energy harvester and a preparation method
  • Micro electromagnetic energy harvester and a preparation method
  • Micro electromagnetic energy harvester and a preparation method

Examples

Experimental program
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Effect test

Embodiment 1

[0038] The miniature electromagnetic energy harvester consists of three main parts: an electroplated permanent magnet 60, a vibrating membrane 70 and a planar helical coil 80, such as figure 1 shown. The V-shaped groove 1 of the silicon wafer is obtained by wet etching the silicon wafer 10. The permanent magnet of the energy harvester of the present invention is realized by the electroplating permanent magnet array 60 located in the V-shaped groove 1 of the silicon wafer. The vibrating film 70 is located on the silicon wafer. The surface of the sheet is facing the electroplated permanent magnet array 60 , and the planar spiral coil 80 is located directly above the vibrating membrane 70 . The vibrating membrane 70 is composed of four crab-like cantilever beams and a vibrating plate, and the crab-like cantilever beams are as image 3 shown. The cantilever beam is connected at four right angles of the vibrating plate, and has the same thickness. During electroplating, the cant...

Embodiment 2

[0053] A method for preparing a miniature electromagnetic energy harvester, using a three-dimensional micromachining method combining bulk silicon and surface micromachining techniques, that is, using bulk silicon micromachining techniques to etch silicon to form V-shaped grooves, and The permanent magnet is electroplated in the groove, and then the vibrating membrane and the planar spiral coil are fabricated by surface micromachining technology.

[0054] Including the following steps:

[0055] (1) Backside alignment symbol creation

[0056] Sputter 100nm metal chromium on the back of the silicon wafer, then throw a 5μm thick positive resist AZ P4620, photolithography, develop, etch the metal chromium with 8% hydrochloric acid, remove the positive resist with acetone, and obtain the back alignment symbol of the metal chromium.

[0057] (2) Fabrication of V-shaped grooves on silicon wafers

[0058] Wet Etching Plasma Enhanced Chemical Vapor Deposition (PECVD) of SiO 2 The et...

Embodiment 3

[0066] A method for preparing a miniature electromagnetic energy harvester, using a three-dimensional micromachining method combining bulk silicon and surface micromachining techniques, that is, using bulk silicon micromachining techniques to etch silicon to form V-shaped grooves, and The permanent magnet is electroplated in the groove, and then the vibrating membrane and the planar spiral coil are fabricated by surface micromachining technology.

[0067] Including the following steps:

[0068] (1) Backside alignment symbol creation

[0069] Sputter 100nm metal chromium on the back of the silicon wafer, then throw a 5μm thick positive resist AZ P4620, photolithography, develop, etch the metal chromium with 8% hydrochloric acid, remove the positive resist with acetone, and obtain the back alignment symbol of the metal chromium.

[0070] (2) Fabrication of V-shaped grooves on silicon wafers

[0071] Wet Etching Plasma Enhanced Chemical Vapor Deposition (PECVD) of SiO 2 The et...

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Abstract

The invention relates to an electromagnetic energy harvester of a micro electro mechanical system (MEMS) and a preparation method. In the method, a three-dimensional micromachining method combining bulk silicon and surface micromachining technology is adopted, namely, a V-shaped silicon chip groove is etched by bulk silicon micromachining technology; a permanent magnet (array) of the energy harvester is electroplated in the V-shaped groove; diaphragms (a crab claw-shaped cantilever beam and a vibrating plate) and a flat spiral coil of the energy harvester are prepared by the surface micromachining technology. The electromagnetic energy harvester of the invention adopts the electroplating method to prepare the permanent magnet (array) instead of the micro-assembly or adhesion means of the permanent magnet of the traditional energy harvester, so that the energy harvester and preparation thereof can be compatible with the IC process.

Description

technical field [0001] The invention relates to a micro-electromechanical system (MEMS) micro-electromagnetic energy harvester and a preparation method for collecting environmental mechanical vibration or biological motion energy. The electroplating method is used to prepare the permanent magnet required by the electromagnetic energy harvester, and then An energy harvester is prepared by combining MEMS bulk silicon and surface micromachining technology, and belongs to the field of microelectromechanical systems. Background technique [0002] With the rapid development of micro-nano technology, a large number of new micro-nano devices and systems have been continuously developed, such as micro-generators, nano-structured optoelectronic devices, nano-drug delivery and targeted therapy for disease prevention and treatment, etc. However, micro-nano The power supply problem of nano products is becoming the main obstacle to its application, because the power supply of these micro ...

Claims

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Application Information

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IPC IPC(8): H02K35/02H01F7/02H01F41/02
Inventor 袁泉方东明张海霞
Owner 北京大学科技开发有限公司
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