Micro-displacement sensor based on ring micro-chamber and cantilever beam of integration plane

Abstract

The invention relates to a micrometric displacement sensor based on an integrated planar ring-shaped micro cavity and a cantilever beam, which comprises a planar ring-shaped micro cavity, an optical waveguide, a substrate, an incidence fiber connected with the optical waveguide and an emergence fiber connected with the optical waveguide. The planar ring-shaped micro cavity is coupled with the optical phase of the optical waveguide. The micrometric displacement sensor is characterized in that the micrometric displacement sensor also comprises a cantilever beam and a probe; one end of the cantilever beam is connected with the substrate and the other end of the cantilever beam is a free end; the probe is positioned in the middle of the front part of the free end on the lower surface of the cantilever beam, and both the cantilever beam and the probe are formed by etching; and both the planar ring-shaped micro cavity and the optical waveguide are etched on the upper surface of the cantilever beam. The micrometric displacement sensor is made by using a modern MEMS processing technology, can be used in complex magnetic field environments, vacuum environments, can be used for measuring wide range of objects, including the measurement on the surfaces of biological cells as well as the surfaces of metals and non-metals, and has the measuring precision of 10<-4> angstroms.

Description

Technical field [0001] The invention belongs to the technical field of micro-electromechanical systems, and mainly relates to a micro-displacement sensor, in particular to a micro-displacement sensor based on an integrated planar annular microcavity and a cantilever beam. Background technique [0002] In the fields of micro-nano technology, micro-electro-mechanical system technology and precision control technology, micro-displacement sensors are one of the more important components in micro-electro-mechanical systems. For the measurement methods of micro-displacement, currently there are mainly electrical measurement technology and optical measurement technology. Among them, the displacement sensors based on electrical measurement technology mainly include electromagnetic sensors and eddy current sensors. The measurement accuracy of electromagnetic sensors is very low, not reaching the order of micrometers, and is greatly affected by electromagnetics. The measurement accuracy ...

AI Technical Summary

Problems solved by technology

However, the optical fiber micro-displacement sensor will cause large measurement errors due to the fluctuation of the output light energy of the light source, the change of the reflectivity of the reflective object surface and the interference of the external environment; the main disadvantage of the laser interferometry to measure the micro-displacement is that the light source must be interference light. , ordinary light sources cannot be used, and the requirements for system stability are extremely high, so it is not suitable for on-site measurement

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