Manipulator for fetching and delivering silicon chip

Abstract

The invention relates to a mechanical arm which is used for transporting silicon chips. The invention is characterized in that the mechanical arm comprises a horizontal driving mechanism, a vertical driving mechanism, a rotationally driving mechanism and a frame which is used for installing the three driving mechanisms, wherein the horizontal driving mechanism comprises a horizontal driving motor connected with a bracket which can horizontally move along two horizontal feeding rods through a first transmission device; the vertical driving mechanism comprises a vertical driving motor which is connected to the bracket, and the vertical driving motor is connected with a lifting frame which moves along two vertical feeding rods from top to bottom through a second transmission device; and the rotationally driving mechanism comprises a rotationally driving motor which is connected to the lifting frame and is connected with a main arm through a third transmission device, the top of the main arm perforates through the top of the bracket and is connected with a paw, the upper surface of the paw is provided with a sucking disk, and a vacuum air channel which is communicated with the sucking disk is arranged in the center of the main arm and the paw. The invention has simple structure, small volume and low cost, and can be widely used for a transporting process of various silicon chips.

Description

Technical field [0001] The invention relates to a manipulator, in particular to a manipulator for taking and delivering silicon wafers. Background technique [0002] At present, in the semiconductor manufacturing industry, because silicon wafers are expensive and the cleanliness requirements of silicon wafers during the manufacturing process are also very high, extra care must be taken when handling silicon wafers. The most commonly used manipulators in the form of three-fold arms are manipulators with multi-joint structures such as main arms, jibs, and wrists. The structure is complex and large, and mechanical particles are likely to cause secondary pollution to the silicon wafer during movement. . Summary of the invention [0003] In view of the above-mentioned problems, the purpose of the present invention is to provide a small-sized and simple-structured manipulator for handling silicon wafers. [0004] In order to achieve the above objectives, the present invention adopts t...

AI Technical Summary

Problems solved by technology

Now the most used is the manipulator in the form of a three-fold arm. This type of manipulator adopts a multi-joint structure such as a main arm, an auxiliary arm, and a wrist.

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