Flexible retina salient point micro-electrode chip and production method thereof

Abstract

The invention discloses a flexible retina emboss micro-electrode chip in the technical field of a micro-electronic-mechanical-system and a manufacture method thereof. In the method, parylene C is used as a flexible substrate and an insulating material for preparing a micro-electrode array which is formed by the arrangement of a plurality of micro-electrode sensing elements; simultaneously, an electrode lead and a lead welding point are manufactured to form the flexible retina emboss micro-electrode chip which is planted into the retina part of a human eye, can realize the safe and effective contact with the neuron of the retina, effectively reduce the stimulation to a pulse current, reduce the inserting damage to a biological tissue caused by the planting of the micro-electrode and can improve the effect of electric simulating and neural signal recording, thereby better recovering the visual function. In the invention, the parylene C is used as the substrate of a flexible electrode; the excellent electric insulating performance and mechanical performance thereof can improve the biocompatibility of the micro-electrode chip to a larger extent and have good stability for a long period. In the invention, an MEMS technique is adopted, thus realizing the integration of a functional unit and the flexible substrate of the micro-electrode.

Description

technical field [0001] The invention relates to a device and a method in the technical field of micro-electromechanical systems, in particular to a flexible retinal bump micro-electrode chip and a manufacturing method thereof. Background technique [0002] The retina is the source of visual function, where light stimuli are converted into visual nerve impulses. For blindness caused by retinal diseases, such as age-related macular degeneration (AMD) and retinitis pigmentosa (RP), implantation of retinal microelectrode chips is a potential means of restoring vision. The basic principle is: the external light signal is sensed by the implant prosthesis, after some specific signal processing, it is converted into a bioelectrical signal, stimulates and activates the optic nerve cells and their connection network, and then transmits the electrical signal to the visual center of the brain through the optic nerve. , resulting in vision. [0003] The flexible retinal microelectrode ...

AI Technical Summary

Problems solved by technology

At present, the production of flexible microelectrodes based on polymer materials in the world generally adopts planar technology, which cannot achieve good contact between electrode sites and nerves, and the processing structure is relatively simple, which affects the effect of nerve stimulation or signal recording.

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