Beam transforming element, illumination optical apparatus, exposure apparatus, and exposure method
An illuminating device and optical technology, applied in the direction of photolithography process exposure device, optical element, microlithography exposure equipment, etc., can solve the problems of light loss, low light throughput of exposure device, etc., and achieve high productivity and suppress the effect of light loss.
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[0070] Hereinafter, embodiments of the present invention will be described based on the attached drawings.
[0071] FIG. 1 is a schematic diagram showing the configuration of an exposure apparatus equipped with an optical illumination device according to an embodiment of the present invention. In FIG. 1, the normal direction of the wafer W as the photosensitive substrate is set as the Z axis, and the direction parallel to the paper surface of FIG. 1 in the plane of the wafer W is the Y axis. The vertical direction of the paper surface of Fig. 1 is the X axis. The exposure apparatus of this embodiment is provided with a light source 1 for supplying light for exposure (illumination light).
[0072] As the light source 1 , for example, a KrF excimer laser (Excimer Laser) light source that supplies light with a wavelength of 248 nm or an ArF excimer laser light source that supplies light with a wavelength of 193 nm can be used. The approximately parallel light beam emitted from ...
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