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High-repeat frequency photonic crystal fiber ultraviolet ultrashort-pulse laser machine

A technology of photonic crystal fiber and ultrashort pulse laser, which is applied in the direction of laser, cladding fiber, optical waveguide and light guide, etc., can solve the problems of limited processing accuracy and application space, high follow-up operation cost, and toxic gas working medium, etc., and achieve structural Simple, narrow pulse width, good stability

Inactive Publication Date: 2008-12-24
TIANJIN UNIV
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Problems solved by technology

[0003] (DPSS) and titanium sapphire lasers [1, 2], their common disadvantages are bulky, expensive, and low repetition frequency (1-50KHz); The pulse width of Q's solid-state laser is on the order of ns or ps; in addition, the limited life of the high-purity gas working medium in the excimer laser brings high follow-up operation costs and defects such as poisonous gas working medium
These all limit the higher processing accuracy and application space of this type of laser in micromachining

Method used

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  • High-repeat frequency photonic crystal fiber ultraviolet ultrashort-pulse laser machine

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Embodiment Construction

[0022] The high repetition frequency photonic crystal fiber ultraviolet ultrashort pulse laser processing machine of the present invention is as attached figure 1 As shown, the specific examples are as follows:

[0023] The laser oscillation level is as figure 2 For the photonic crystal fiber laser shown, the gain medium is Yb-doped large-mode double-clad polarization-maintaining photonic crystal fiber 1-2, the core diameter is 25 microns, the NA is 0.03, the outer cladding diameter is 250 microns, the NA is 0.5, and the length is 3.5m, the two ends have been collapsed and polished to beveled directly for cladding pumping, or welded with SMF of appropriate length, and pumped by WDM; the oscillation stage uses 10W LD1-1 for single-sided or double-clad pumping One end of the resonant cavity adopts semiconductor saturable absorbing mirror and polarization rotation mixer mode-locking 1-3 as the output port, and the other end of the resonant cavity adopts grating pair or large ne...

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Abstract

The present invention discloses a high pulse repetition frequency photonic crystal fiber ultraviolet ultrashort pulse laser processor, which belongs to the laser technology field. The processor is composed of a photonic crystal fiber or solid femtosecond laser oscillator stage, a high-power, large-mode-field photonic crystal fiber laser amplifier, a laser frequency multiplier, a collimating and focusing system, a precision three-dimensional micro-moving platform with the nanometer-level precision and a computerized control system. The processor has the advantages of high pulse repetition frequency, simple structure, good stability, low operation cost, high laser beam quality, small pulse width and high power.

Description

technical field [0001] The invention relates to a high repetition frequency photonic crystal fiber ultraviolet ultrashort pulse laser processing machine, which belongs to the field of laser technology. Background technique [0002] Laser micromachining has become a major tool in MEMS fabrication. But the thermal effect of these long pulse laser processing seriously affects its processing accuracy in microfabrication. However, ultrashort pulse laser micromachining has a smaller thermal effect accumulation, so it has higher precision and smaller size than continuous or long pulse laser micromachining. At the same time, the photon energy of the ultrashort pulse laser with ultraviolet wavelength is high, which can reach the chemical bond energy of the material, and can be directly peeled off without heat exchange, which is very beneficial for the processing of biochips; in addition, the shorter the wavelength, the lower the diffraction limit. Small, so it has more advantages i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/00H01S3/00G02F1/35G02F1/355G02B6/02B23K26/0622
Inventor 王清月柴路胡明列刘博文宋有建
Owner TIANJIN UNIV
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