Single-crystal furnace guide shell and production process thereof

Abstract

The invention discloses a single crystal furnace guide shell by adopting carbon or carbon composite material and a production technique thereof, which is characterized in that the guide shell comprises a high-density carbon or carbon composite material exterior layer(3) and a low-density carbon or carbon composite material interior layer (2). The production technique is that the carbon fiber is processed by blank making, densification, purification and machining. The invention has reasonable technique. As the exterior layer (3) of the guide shell is the high-density (1.2g / cm<3> to 1.7g / cm<3>) carbon or carbon composite material with flexural strength of about 110 MPa and the thermal conductivity of only about 10W / mK while the interior layer (2) is the low-density (0.4g / cm<3> to 0.9g / cm<3>) carbon or carbon composite material with thermal conductivity of only about 0.8W / mK. Therefore, the guide shell has good comprehensive properties, which not only has enough strength and wear resistance but also has good thermal shock resistance and insulation performance. At the same time, compared with a graphite guide shell, the wall thickness of the guide shell is reduced, the weight of the guide shell is reduced and the self energy consumption is also lowered.

Description

Technical field: [0001] The invention relates to a thermal field part of a single crystal furnace, in particular to a single crystal furnace guide tube and a production process thereof. Background technique: [0002] When the single crystal furnace draws single crystal silicon rods, the quartz crucible containing polycrystalline silicon blocks and other raw materials is placed in the graphite crucible holder above the crucible holder, and heated and melted in a protective atmosphere. After adjusting the process temperature, the seed crystal is guided The flow cylinder is inserted into the molten polysilicon liquid, rotates against the crucible and lifts upwards, so that the polysilicon liquid crystallizes and solidifies into single crystal silicon rods according to the order of the silicon atoms of the seed crystal. At present, the guide tube of single crystal furnace is generally made of graphite, which plays the role of high temperature gas guide in the process of drawing ...

AI Technical Summary

Problems solved by technology

Due to the low strength of graphite products, its flexural strength is about 13MPa, thermal conductivity is about 140W / mK, the thermal shock resistance is poor, and the service life is short; in addition, the large-size guide tube is difficult to form, and there are many consumables, which are difficult to meet The need for the development of monocrystalline silicon production

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