Etching method and apparatus for a single wafer
An etching equipment and monolithic technology, which is applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of increased air flow, uneven etching of the edge, and damage to the chamfer shape of the edge
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[0054] Such as figure 1 As shown, a monolithic etching apparatus 10 is used to etch a silicon wafer 11 having a diameter of 300 mm and a thickness of 0.8 mm. Here, the gap adjusting device 20 adjusts the gap GP between the upper surface of the lower surface blowing mechanism 17 and the lower surface 11c of the wafer 11 to 0.4mm, and the position BP of the ejection port 17a is set to be from the radially inner side of the wafer. The outer edge of the wafer is 3mm away from the position. In addition, the flow rate BF of the gas injected from the injection port 17a is set to 500 liters / minute, and G / B is set to 500, where G liters / minute is the flow rate of the gas from the injection port 17a, and Bmm is the injection port width. Moreover, the rotation speed of the wafer 11 was set to 400 rpm, and the angle θ formed by the spray groove 17b with respect to the horizontal plane was 1 Be set to 30 degrees, the flow rate of the etchant 14 ejected from the first nozzle 21 is set to...
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