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Disk-shaped substrate manufacturing method and washing apparatus

A manufacturing method and cleaning device technology, applied in the direction of cleaning methods using liquids, cleaning methods using tools, disc carrier manufacturing, etc., can solve problems such as difficult and uniform cleaning, differences in cleaning capabilities, and different contact states, and achieve stable cleaning , Good effect of removing particles

Active Publication Date: 2008-09-17
RESONAC CORPORATION
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when pressing and cleaning a relatively large area like this, the physical force is different depending on the pressing state and the pressing position, and cleaning differences are likely to occur.
Especially in the case of contacting a relatively large area at the same time, the contact state is different depending on the contact position of the disk, or the cleaning ability is different depending on the area, and it is difficult to perform uniform cleaning

Method used

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  • Disk-shaped substrate manufacturing method and washing apparatus
  • Disk-shaped substrate manufacturing method and washing apparatus
  • Disk-shaped substrate manufacturing method and washing apparatus

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Embodiment Construction

[0028] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0029] 1A-H are diagrams showing manufacturing steps of a disk-shaped substrate (disk substrate) to which this embodiment is applied. In this manufacturing process, first, in a primary grinding process as shown in FIG. 1A , the raw material of the disc-shaped substrate (work) 10 is placed on the stage 21, and the flat surface 11 of the disc-shaped substrate 10 is ground. . At this time, on the surface of the table 21 on which the disc-shaped substrate 10 is placed, abrasive grains such as diamond are dispersedly embedded.

[0030] Next, in the inner and outer circumference grinding process shown in FIG. 1B, the inner circumference 12 of the hole (hole) opened in the center of the disc-shaped substrate 10 is ground with the inner circumference grindstone 22, and the outer circumference grindstone is used to grind the inner circumference 12 of the hole (hole). ...

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Abstract

The invention provides a disk-shaped substrate manufacturing method and washing apparatus that can realize more steady washing and manufacture excellent disk-shaped substrate with less granule. The washing apparatus washes the disk-shaped substrate (10) surface at the same time supply washing liquid. The washing apparatus includes: a first porous roller (110a) and a second porous roller (110b) that have a cylindrical shape and can contact with a first surface and a second surface of a disk-shaped substrate (10) respectively; a shaft distance changing mechanism that the first porous roller (110a) and the second porous roller (110b) can move on changing shaft distance direction, namely, x direction, the shaft distance changing mechanism makes the first porous roller (110a) and the second porous roller (110b) stopping a pre-set shaft position, and contacting with the disk-shaped substrate (10).

Description

technical field [0001] This invention relates to the manufacturing method of the disk-shaped substrates, such as a glass substrate for magnetic recording media, etc., for example. Background technique [0002] In recent years, the manufacture of disk-type substrates, which are disk-shaped substrates, has become active in response to an increase in demand for recording media. As a magnetic disk substrate which is one of such disk substrates, aluminum substrates and glass substrates are widely used. Such an aluminum substrate is characterized by high workability and low cost, and a glass substrate is characterized by excellent strength, surface smoothness, and flatness. In particular, recently, the demand for miniaturization and high density of disk substrates has been significantly increased, and attention has been paid to glass substrates that can achieve high density by reducing the surface roughness of the substrate. [0003] With such a magnetic disk substrate, for exam...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/84C03C23/00B08B7/04B08B1/04B08B11/04B08B3/04
CPCB08B1/04H01L21/67046
Inventor 羽根田和幸小林正彦远山行仲
Owner RESONAC CORPORATION
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