On-line verification method for processing cassegrain two-mirror optics system
A Cassegrain double mirror and optical system technology, which is applied in the direction of optical instrument testing, optical performance testing, measuring devices, etc., can solve problems such as online inspection, and achieve the effect of ensuring processing quality
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[0013] According to attached figure 1 The processing and inspection optical path diagram of the sub-mirror 201, we designed a paired processing and inspection optical path for a Cassegrain two-mirror optical system 2 with an on-axis point imperfect imaging. The optical parameters of this Cassegrain two mirror optical system 2 are shown in Table 1:
[0014] Table 1
[0015]
[0016] The inspection light path design is as follows:
[0017] The standard self-collimating plane mirror 1 adopts a plane mirror with a diameter of 250mm and a surface accuracy of one-tenth of the wavelength; the compensation lens 3 adopts BK7 optical glass, and the specific optical design parameters are shown in Table 2:
[0018] Table 2
[0019]
[0020] After the compensation lens 3 is added, the Cassegrain two-mirror optical system forms a perfect image on the 2-axis point, and the wave aberration of the point on the axis is close to one-fiftieth of the wavelength; the detection instrument 4...
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