Double quality oscillatory type silicon micro-gyroscopes

Abstract

The invention comprises an upper layer and a lower layer. On the upper layer there is a gyroscope mechanical structure made on a monocrystalline silicon plate; on the lower layer there are signal leads made on the glass substrate. The gyroscope mechanical structure is composed of two identical substructures; said two substructures are set in bilateral symmetry and respectively connected to the cross beam; the cross beam is connected to the fixed base through two groups of twisted bars; said fixed base is mounted on the linkage point o the fixed base on the glass substrate in order to make the mechanical structure part on the upper layer hang above the glass substrate.

Description

technical field [0001] The invention belongs to micro-electromechanical system and micro-inertia measurement technology, in particular to a double-mass vibrating silicon micro-gyroscope. Background technique [0002] Micromachined inertial instruments include micromachined gyroscopes (MMG) and micromachined accelerometers (MMA). The use of microelectronic processing technology allows the complete integration of micromechanical structures and required electronic circuits on a silicon chip, thereby achieving a high degree of unity in terms of performance, price, volume, weight, and reliability. Therefore, this type of instrument has a series of advantages (such as small size, light weight, cheap price, high reliability, mass production, etc.), and has broad application prospects in both military and civilian fields. In civilian use, it is mainly used in the automotive industry, industrial monitoring and consumer products and robotics, such as airbags, anti-lock braking system...

AI Technical Summary

Problems solved by technology

The dual-mass design of the gyroscope can increase the output signal, but its drive is fully coupled with the sensitive motion, and the linearity of angular vibration is poor, which limits the improvement of its sensitivity

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