Surface wave sensor device
A sensor and surface wave technology, used in instruments, scientific instruments, and the use of sonic/ultrasonic/infrasonic waves to analyze fluids, etc., can solve problems such as troublesome bonding operations, changes in electrical characteristics, and inability to detect substances, and achieve high reliability and manufacturing process. Easy, simplified effect
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[0092] Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention while referring to the drawings.
[0093] 1(a) and (b) are front sectional views of a surface wave sensor device according to a first embodiment of the present invention and schematic plan views of a surface acoustic wave element used in the surface wave sensor device.
[0094] The surface wave sensor device 1 has a base substrate 1 . The base substrate 2 can be made of suitable insulating ceramics such as alumina. However, the base substrate 2 may be made of an insulating material other than ceramics.
[0095]The base substrate 2 has a first main surface 2 a and a second main surface 2 b opposing the first main surface 2 a. Then, in this embodiment, the first and second surface acoustic wave elements 11 and 12 are mounted on the insulating substrate 2 as a plurality of surface acoustic wave elements.
[0096] The surface acoustic wave element 11 has a rec...
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