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Supply power adjusting apparatus and semiconductor manufacturing apparatus

A technology for power regulators and manufacturing devices, applied in semiconductor/solid-state device manufacturing, output power conversion devices, electric heating devices, etc., can solve problems such as power supply changes and load change stability deterioration, and achieve excellent temperature responsiveness and use Good convenience and good stability

Active Publication Date: 2008-02-20
KOKUSAI ELECTRIC SEMICON SERVICE +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Furthermore, although the two can be used in common, there is a problem that the stability against power supply changes and load changes deteriorates because no measures are taken against power supply changes and load changes.

Method used

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  • Supply power adjusting apparatus and semiconductor manufacturing apparatus
  • Supply power adjusting apparatus and semiconductor manufacturing apparatus
  • Supply power adjusting apparatus and semiconductor manufacturing apparatus

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Embodiment Construction

[0027] As a result of the research to achieve the above purpose, the inventors found the most suitable technical solution for the above purpose when considering the power consumption and high-speed switching of the IGBT, and then obtained that if the AC voltage is directly switched by the IGBT, there is no need to have a rectification circuit. insights, leading to the creation of the present invention.

[0028] One embodiment of the power supply conditioner of the present invention will be described below.

[0029] In the power supply conditioner of this embodiment, the output of the inverter performing high-speed switching operation is used as power supply to the heater, and an IGBT, which is a high-speed switching power control element, is used as a device of the inverter. The AC voltage of the AC power supply is directly switched by the IGBT and the pulse-modulated AC power is supplied to the heater, so that the reactive power is almost zero, thereby effectively utilizing t...

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PUM

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Abstract

A semiconductor manufacturing apparatus for performing heat treatment by carrying a substrate holder, on which a plurality of substrates are loaded, into a reacting furnace. The semiconductor manufacturing apparatus is provided with a heater arranged on a circumference of the reacting furnace, and a supply power adjusting apparatus for adjusting a supplying power to the heater. The supply power adjusting apparatus is composed of a power IGBT converter for converting an alternating voltage from an alternating power supply into an alternating power in accordance with the frequency of a control signal and supplying the heater with the alternating power, and a regenerating IGBT converter for regenerating a back electromotive force generated by switching operation of the IGBT converter and returning the back electromotive force to the alternating power supply.

Description

technical field [0001] The present invention relates to a power supply regulator for supplying power to a heater and a semiconductor manufacturing device using the power supply regulator. Background technique [0002] Fig. 3 shows a conventional power supply conditioner for a heater. The heater power supply conditioner 20 has a power receiving terminal board 2 connected to the AC power supply 1 at its input end and a distribution terminal board 6 connected to the heater 7 at its output end. A power circuit breaker 3 , a power transformer 4 , and a power control thyristor 5 serving as a power conditioner are connected between the power receiving terminal board 2 and the distribution terminal board 6 . A thermocouple 8 for temperature measurement is provided in the heater 7 . [0003] An AC power source 1 is input from a power receiving terminal board 2 , and power is supplied to a power transformer 4 through a power circuit breaker 3 . The power transformed by the power tr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02M5/293H05B3/00G05F1/45H01L21/02
CPCH02M5/293G05F1/45H01L21/02H05B3/00
Inventor 石津秀雄铃木雅行
Owner KOKUSAI ELECTRIC SEMICON SERVICE
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