Film single-axis bidirectional decline micro-stretching device and method for measuring

Abstract

The invention provides a film single-shaft bidirectional tensing mechanism and a measuring method for the deformation in the film, and pertains to the field of precision machinery. The mechanism uses two piezoelectric ceramics 8 to push from two directions respectively a slider 4 and an adjustable slider 3 that can move along a slideway 2, between the slider 4 / the adjustable slider 3 and a support 1, limit springs 9 are used for limiting; on the slider 4 and the adjustable slider 3, a force sensing arm 6 is fixedly connected respectively; the top of the force sensing arm 6 is connected with a stage. At measuring, first a film specimen to be measured is clamped on the stage; then the piezoelectric ceramics 8 are applied with voltage continuously, so that the two force sensing arms 6 will have mini displacement opposite to each other; meanwhile, the images and mechanic parameters of the film deformation are recorded by a real-time acquisition system and stress pieces 5 attached on the force sensing arms 6. By the invention, the measuring area can be observed continuously, and measurement of wider range can be carried out by force sensing arms of different measuring ranges.

Description

technical field [0001] The invention belongs to the field of precision machinery, in particular to a method for film loading and film deformation detection in a microscopic environment. Background technique [0002] At present, the testing techniques for film materials mainly include indentation, film curving or film bending, bulge test, microstructure testing, and uniaxial tensile testing. )Wait. Among them, the uniaxial tensile method is the most direct method to measure the mechanical properties such as elastic modulus, Poisson's ratio, yield strength and fracture strength of the film. At present, there are mainly the following micro-tensioning devices based on optical microscope, electron beam scanning microscope and atomic force scanning microscope system: (1) Interferometric strain gauge method based on high-precision strain measurement combined with piezoelectric ceramic unidirectional driving micro-tensioning device ; (2) Based on dual-field microscopy technology c...

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to overcome the problem that the observed area of ​​the sample moves out of the detection area during the measurement of the piezoelectric ceramic one-way drive structure, and provide a piezoelectric ceramic two-way drive device to ensure that the observed area is always in the detection area during the measurement process (Inside the field of view for an optical microscope)

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