Wireless receiving microelectronic mechanical microwave power sensor and manufacturing method therefor
A micro-electronic machinery and microwave power technology, applied in the direction of electromagnetic field characteristics, etc., can solve the problem of not being able to directly receive microwave power, and achieve the effect of broadening the microwave measurement frequency band, reducing return loss, and achieving impedance matching.
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[0032] The sensor uses gallium arsenide as the substrate 8, on the gallium arsenide substrate 8 there is a layer of AlGaAs thin film 9, on the AlGaAs thin film 9 there is a layer of coplanar waveguide antenna 1, and a section of the antenna is etched away The U-shaped slot 3 has a parasitic element patch 2 on both sides of the antenna, the end of the coplanar waveguide antenna 1 is connected to the coplanar waveguide transmission line 4, and there are two parallel load resistors at the end of the coplanar waveguide transmission line 4, and the load resistor 5 The outer side of the thermopile is correspondingly provided with a thermopile 7, and the two ends of the thermopile 7 are connected to the two pressure welding blocks 6 through wires. The present invention receives the microwave signal from the outside through the special structure coplanar waveguide antenna at the front end, and then transmits the microwave signal to the terminal th...
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