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Method for producing pattern magnetic-recording medium with continuous inverse-impression direct transfer

A magnetic recording medium and patterning technology, applied in the manufacture of record carriers, sound recording carriers, semiconductor/solid-state devices, etc., can solve the problems of low manufacturing adaptability, complex production process and high production cost of high-density magnetic storage devices , to achieve the effect of ensuring dimensional accuracy and shape accuracy, reducing production costs and improving productivity

Inactive Publication Date: 2009-03-11
XI AN JIAOTONG UNIV
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Problems solved by technology

[0004] The above-mentioned conventional processes are not adaptable to the manufacture of high-density magnetic storage devices requiring high productivity, and the production process is complicated, the production cost is high, and the efficiency is low

Method used

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  • Method for producing pattern magnetic-recording medium with continuous inverse-impression direct transfer
  • Method for producing pattern magnetic-recording medium with continuous inverse-impression direct transfer
  • Method for producing pattern magnetic-recording medium with continuous inverse-impression direct transfer

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Embodiment Construction

[0026] Figure 1 to Figure 8 It is a schematic diagram of the manufacturing process of continuous pattern direct transfer patterned magnetic recording medium. The method for manufacturing a patterned magnetic recording medium by direct transfer of continuous patterns of the present invention includes a combination of the following processes: metal deposition process (attached figure 1 ), embossing mold surface treatment (attached figure 2 , 3 , 4), embossing process (attached Figure 5 , 6 ), electroplating process (attached Figure 7 ), plasma etching process (attached Figure 8 ).

[0027] Compared with the traditional nanoimprinting process, the method for preparing patterned magnetic recording medium provided by the present invention adopts the combined process of rotary inverse imprinting and electroplating process to continuously and directly transfer patterns, the production process is simpler, and the production efficiency is higher. High, it has great advantag...

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Abstract

A method for preparing patternized magnetic recording media of continuous pattern direct-transfer type includes transferring photo-resist at microstructure convex surface of mould to substrate surface by utilizing patternized cylindrical impression mould through micro-contact reverse impression technology in order to form patternized mask layer, growing magnetic media with patternization character at non-mask region on substrate surface by electric plating process and flattening surface of said media and said mask layer by plasma-etching process for obtaining patternized magnetic recording media with space packed by nonmagnetic material.

Description

technical field [0001] The invention belongs to the field of micro-manufacturing, and relates to a method for manufacturing a patterned magnetic recording medium, in particular to a method for manufacturing a patterned magnetic recording medium by direct transfer of continuous reverse embossing patterns, which is mainly used for large-area patterns Manufacture of high-density magnetic storage magnetic recording devices. Background technique [0002] In magnetic storage devices, in order to achieve higher magnetic storage density, nanoscale island-like patterned magnetic spot arrays are used instead of continuous magnetic recording media. High-density magnetic storage devices require smaller and smaller nanoscale island-shaped magnetic recording media. Studies have shown that when the diameter of the island-shaped magnetic spot is greater than 160nm, the magnetic spot has a multi-domain structure, and the diameter of the magnetic spot is reduced to 80nm. Each magnetic spot e...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G11B5/84H01L21/302B29D17/00
Inventor 刘红忠丁玉成秦歌卢秉恒
Owner XI AN JIAOTONG UNIV
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