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Method for producing solid product

a solid product and method technology, applied in the direction of crystal growth process, polycrystalline material growth, silicon compounds, etc., can solve the problems of short supply capacity of polycrystalline silicon, high electric power consumption rate, and inability to meet marketing needs, so as to prevent the lowering of quality and high purity. , the effect of high purity

Inactive Publication Date: 2009-06-30
JNC CORP
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Benefits of technology

The present invention aims to provide a method and apparatus for producing a solid product using a reaction of gaseous raw materials with a plurality of components using a vertical reactor. The method includes steps of conducting the reaction using a reactor disposed substantially in a vertical direction, feeding the gaseous raw materials with a plurality of components from the upper part of the reactor, forming a gas layer composed of a gas having a density equal to or more than the density of the raw materials or unreacted gas fed continuously from the lower part of the reactor, discharging an exhaust gas containing a by-product gas generated by the reaction and unreacted gaseous raw materials from the reactor, and accommodating a solid product in the seal gas layer of the lower part of the reactor. The method and apparatus can produce a solid product with a higher purity, continuous operation, and improved production efficiency.

Problems solved by technology

In addition to the increase in demand for polycrystalline silicon for highly integrated semiconductors used in electronic devices and information technology devices, demand for polycrystalline silicon as silicon for solar cells has rapidly been expanded recently, but at this time, the supply capacity of polycrystalline silicon is short and there is a situation that the marketing needs cannot be met.
Nowadays, the production of polycrystalline silicon conducted commercially has been carried out by a Siemens process, but this process has a high electric power consumption rate of manufacturing consumption rates and the operation of production devices is a batch type, so its production efficiency is low.
Therefore, it is unsuitable as a production method in a large amount and at low cost.
However, in this technique of producing a solid product using a reaction of gaseous raw materials, there are problems that the resulting solid product is easily contaminated due to materials of a reactor, and also due to a by-product gas generated by the reaction and unreacted gaseous raw materials.Patent document 1: JP H4-365806 A (1992)Patent document 2: JP H8-246001 (1996)Patent document 3: JP 2000-345218 APatent document 4: JP H1-25922 A (1989)Patent document 5: JP 2003-34519 APatent document 6: JP 2003-342016 A

Method used

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Examples

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example 1

[0086]A test of the method for preventing a by-product gas from diffusion or inflow into a seal gas layer was conducted using an apparatus shown in FIG. 2. The reactor 1 was made of quartz and had a size of about 1000 mm in height and 50 mm in diameter. In the upper part of the reactor 1, a device for heating and generating a zinc chloride gas 70 by which gasified zinc chloride is generated by external heat was incorporated. In the middle part, there was provided an exhaust gas extracting pipe 4 with about 30 mm diameter, and a tank for recovering reducing agent chloride 50 made of glass and having a size of about 600 mm in height and 50 mm in diameter was connected to the tip of the exhaust gas extracting pipe. In the lower part, there was provided a seal gas introducing pipe 6a, and a seal gas was fed from a device for heating and feeding a seal gas. In this test, silicon tetrachloride was used as the seal gas. In the upper part, there was provided a pipe for introducing the balan...

example 2

[0091]A production test of polycrystalline silicon was conducted using the test production apparatus constituted as shown in the schematic diagram exemplified in FIG. 4 and the quality was checked. The reactor was made of quartz and had a structure combining a quartz cylinder of 200 mm in inner diameter and 3350 mm in length as the upper member and a stainless steel cylinder of 200 mm in inner diameter and 1300 mm in length as the lower member. At a height 2000 mm apart from the upper part of the test apparatus, an exhaust gas extracting pipe of 40 mm in inner diameter and 700 mm in length was attached, and there was provided a seal gas introducing opening at a height of 3500 mm. In the central part of the ceiling of the reactor, one silicon chloride feeding pipe made of quartz and having an inner diameter of 20 mm, of which the tip had been processed to be thin-walled was inserted. Further, at a position 60 mm apart from the center toward the circumference, reducing agent gas feedi...

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Abstract

Provided is a production method for producing a solid product by a reaction of gaseous raw materials with a plurality of components including a step of conducting the reaction using a reactor disposed in a vertical direction; a step of feeding the gaseous raw materials with a plurality of components from the upper part of the reactor; a step of, in the lower part of the reactor, forming a seal gas layer composed of a gas having a high density and fed continuously from the lower part of the reactor; a step of discharging an exhaust gas containing a by-product gas generated by the reaction and unreacted gaseous raw materials from somewhere in the upper part of the formed seal gas layer; and a step of accommodating a solid product in the seal gas layer of the lower part.

Description

CROSS-REFERENCE TO RELATED APPLICATION[0001]This application claims the priority benefit of Japan application serial no. JP2007-061207, filed Mar. 12, 2007. All disclosure of the Japan application is incorporated herein by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to a method and an apparatus for producing a solid product with a high purity using a reaction of gaseous raw materials with a plurality of components.[0004]2. Description of Related Art[0005]As a technique for producing a solid product using a reaction of gaseous raw materials with plurality of components, there is known a technique by which a metal with a high purity is produced by a gas phase reaction of a metal chloride gas and a reducing agent gas.[0006]For example, there are disclosed a technique for producing ultrafine nickel powder by a gas phase reduction of a nickel chloride gas with a hydrogen gas (for example, see Patent documents 1 and 2) and a tech...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): C01B33/02B01J19/00
CPCC01B33/027C01G9/04C01P2006/80Y10T117/10
Inventor HONDA, SHUUICHITANAKA, TORUHAYASHIDA, SATOSHI
Owner JNC CORP
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