Field device and method of operating high voltage semiconductor device applied with the same

a field device and high voltage technology, applied in the field of field devices and methods of operating high voltage (hv) semiconductor devices, can solve the problems of failure of hv-well isolation, limited maximum operating voltage, and failure of mosfets under high voltage operation, so as to increase the cost and the effect of device area, the threshold voltage (vth) of the field device is effectively improved

Active Publication Date: 2014-03-20
MACRONIX INT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The patent is about a way to improve the performance of a field device without increasing its cost or space. This helps prevent the field device from turning on when the semiconductor device it's connected to is under high voltage.

Problems solved by technology

It means that MOSFETs under high voltage operation, maximum operating voltage is limited by turned on threshold voltage (Vth) of parasitic field devices which might be lower than the breakdown voltage of MOSFETs.
However, this method requires largest area for pad and has risk to cause HV-well isolation failed.
Another method to avoid inducing parasitic field transistor turned on is increasing the thickness of oxide (ILD or IMD) on the HV-well, thereby raising the difficulty for channel reverse of HV-well under HV operation.
However, this method requires longer time for growing oxide, which needs extra thermal budget, and the heat accumulation might have considerable effect on other components of the HV semiconductor device.

Method used

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  • Field device and method of operating high voltage semiconductor device applied with the same
  • Field device and method of operating high voltage semiconductor device applied with the same
  • Field device and method of operating high voltage semiconductor device applied with the same

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first embodiment

[0018]FIG. 1A is a top view of a high voltage metal-oxide-semiconductor (HVMOS) having a field device according to the first embodiment of the present disclosure. FIG. 1B is a cross-sectional view of the HVMOS and the field device corresponding to FIG. 1A according to the first embodiment of the present disclosure. Please refer to FIG. 1A and FIG. 1B. HVMOS 1 includes a P-substrate 111, the N+ Buried Layers (NBL) 112 formed within the P-substrate 111, P-wells (PW) 113, a high voltage N-well (HVNW) 114 and 131, a high voltage P-well (HVPW) 115, a N-body 116, the P+ regions 121-122 and 123, a N+ region 124 and the insulations 126. The N+ Buried Layer (NBL) 112 provides isolation functionality. The HVPW 115 is positioned between the HVNW 114 and HVNW 131. The P+ region 121 is formed within the PW 113 and electrically connected to the P-substrate 111, and the N+ region 124 is formed within the N-body 116 as a source of the HVMOS. One insulation 126 (such as oxide) are formed above the P...

second embodiment

[0024]FIG. 2A is a top view of a high voltage metal-oxide-semiconductor (HVMOS) having a field device according to the second embodiment of the present disclosure. FIG. 2B is a cross-sectional view of the HVMOS and the field device corresponding to FIG. 2A according to the second embodiment of the present disclosure. The components of the following embodiments (such as in FIG. 2A and FIG. 2B) identical or similar to the components of FIG. 1A and FIG. 1B of the first embodiment retain the same or similar reference numerals, and the details are not redundantly described.

[0025]In the field device 23 of the second embodiment, the conductive body 233 is disposed under the conductive line 141, and further electrically connected to an external voltage source for applying a fixed voltage bias to the conductive body 233. Fabrication of the conductive body 233 could also be adopted in the current manufacturing process, and no extra cost and device area are required.

[0026]In the second embodim...

third embodiment

[0027]FIG. 3 is a cross-sectional view of a field device according to the third embodiment of the present disclosure. The components of FIG. 3 identical or similar to the components of FIG. 1A-FIG. 2B of the first and second embodiments retain the same or similar reference numerals, and the details are not redundantly described.

[0028]In the third embodiment, the conductive body 333 of the field device 33 is disposed between the first well (e.g. HVNW 131) and the conductive line 141, and the field device 33 further comprises a second doping region 332 formed in the first well (e.g. HVNW 131) for interrupting continuity of the first well. The second doping region 332 and the first well have same dosage type (e.g. the second conductive type), and the doping concentration of the second doping region 332 is larger than the doping concentration of the first well, and the second doping region 332 is electrically connected to the conductive body 333. In one embodiment, the second doping reg...

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Abstract

A field device and method of operating high voltage semiconductor device applied with the same are provided. The field device includes a first well having a second conductive type and second well having a first conductive type both formed in the substrate (having the first conductive type) and extending down from a surface of the substrate, the second well adjacent to one side of the first well and the substrate is at the other side of the first well; a first doping region having the first conductive type and formed in the second well, the first doping region spaced apart from the first well; a conductive line electrically connected to the first doping region and across the first well region; and a conductive body insulatively positioned between the conductive line and the first well, and the conductive body correspondingly across the first well region.

Description

BACKGROUND1. Field of the Invention[0001]The disclosure relates in general to a field device and method of operating high voltage (HV) semiconductor device applied with the same, and more particularly to a field device effectively improves improve turned on threshold voltage (Vth) of parasitic field device of the HV semiconductor device.[0002]2. Description of the Related Art[0003]There is currently an ongoing drive toward the downscaling of device dimensions in virtually all aspects of electronic device manufacture. Smaller electronic devices tend to be more popular than larger, more bulky devices when both devices have substantially equivalent capabilities. For high voltage (HV) or Ultra high voltage (UHV) semiconductor device (such as metal-oxide-semiconductor (MOS) device), metal lines to connecting devices in silicon processes will induce parasitic field transistor turned on when metal lines pass through specific regions. It means that MOSFETs under high voltage operation, maxi...

Claims

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Application Information

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IPC IPC(8): H01L29/02H03K3/01
CPCH03K17/16H01L29/0696H01L29/1083H01L29/1087H01L29/1095H01L29/402H01L29/404H01L29/7816H03K17/56
Inventor CHENG, AN-LICHUNG, MIAO-CHUNHSU, CHIH-CHIAHUANG, YIN-FU
Owner MACRONIX INT CO LTD
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