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Fabrication Methods for Micro Compound Optics

a technology of compound optics and fabrication methods, applied in the field of fabrication techniques, can solve problems such as problems

Inactive Publication Date: 2008-04-24
XRADIA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention is about a method for making a compound optic for short wavelength radiation, which involves fabricating the optic using techniques such as photo and electron-beam lithography, sputter-slice techniques, and micro refractive optics. The invention also includes methods for aligning the optical elements during fabrication and maintaining the alignment during operation. The invention also describes an optical element for short wavelength radiation that includes concentric rings for focusing a beam and segments to support the rings. The invention has various advantages and can be used in various embodiments without limitation.

Problems solved by technology

Challenges arise, however, when fabricating compound optics and Fresnel refractive optics for these short wavelength radiation applications.

Method used

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  • Fabrication Methods for Micro Compound Optics
  • Fabrication Methods for Micro Compound Optics
  • Fabrication Methods for Micro Compound Optics

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Embodiment Construction

[0023]FIG. 1 shows a compound optic or AFO 1, to which the present invention is applicable in one example.

[0024] The exemplary compound optic 1 comprises a diffractive Fresnel zone plate element 5 and one or more refractive Fresnel lens elements 6.

[0025] The compound optic 1 is shown fabricated on a single substrate 8. In practice, the different elements 5, 6 can also be fabricated on separated substrates, in other embodiments.

[0026] In the example in which the compound optic 1 is an AFO, it includes a primary focusing element, which is the diffractive Fresnel zone plate 5, and chromatic dispersion compensating elements which is the refractive lenses 6. The refractive lens 6 compensates for the chromatic dispersion of the zone plate 5 but with no or very small focusing effect.

[0027] For micro-imaging applications involving short wavelength radiation, i.e., radiation in the wavelength range of 0.02 nanometers (nm) to 20 nm, the width of the segments in the refractive lens 6 typic...

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Abstract

Methods for fabricating refractive element(s) and aligning the elements in a compound optic, typically to a zone plate element. The techniques are used for fabricating micro refractive, such as Fresnel, optics and compound optics including two or more optical elements for short wavelength radiation. One application is the fabrication of the Achromatic Fresnel Optic (AFO). Techniques for fabricating the refractive element generally include: 1) ultra-high precision mechanical machining, e.g,. diamond turning; 2) lithographic techniques including gray-scale lithography and multi-step lithographic processes; 3) high-energy beam machining, such as electron-beam, focused ion beam, laser, and plasma-beam machining; and 4) photo-induced chemical etching techniques. Also addressed are methods of aligning the two optical elements during fabrication and methods of maintaining the alignment during subsequent operation.

Description

RELATED APPLICATIONS [0001] This application is a Divisional of U.S. application Ser. No. 10 / 688,187, filed on Oct. 17, 2003, which claims the benefit under 35 USC 119(e) of U.S. Provisional Application No. 60 / 419,331 filed on Oct. 17, 2002, both of which are incorporated herein by reference in their entirety.BACKGROUND OF THE INVENTION [0002] The present invention pertains generally to fabrication techniques to be used for fabricating micro refractive, such as Fresnel, optics and compound optic comprising two or optical elements for short wavelength radiation. One application is the fabrication of the (AFO) described in U.S. patent application Ser. No. 10 / 134,026, which is incorporated herein by this reference in its entirety. [0003] The Achromatic Fresnel Optic (AFO) is a multi, such as two, element compound optic that is comprised of a diffractive Fresnel zone plate and a one or more refractive Fresnel lenses. The optic is described in U.S. patent application Ser. No. 10 / 134,026,...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G02B27/44G02B3/08G03F7/00
CPCG02B3/08G02B27/4211Y10S438/975G03F7/0005G02B27/4272
Inventor YUN, WENBINGWANG, YUXINFESER, MICHAELLYON, ALAN
Owner XRADIA
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