MEMS scanner with dual magnetic and capacitive drive

Abstract

A MEMS scanning device includes more than one type of actuation. In one approach capacitive and magnetic drives combine to move a portion of the device along a common path. In one such structure, the capacitive drive comes from interleaved combs. In another approach, a comb drive combines with a pair of planar electrodes to produce rotation of a central body relative to a substrate. In an optical scanning application, the central body is a mirror. In a biaxial structure, a gimbal ring carries the central body. The gimbal ring may be driven by more than one type of actuation to produce motion about an axis orthogonal to that of the central body. In another aspect, a MEMS scanning device is constructed with a reduced footprint.

Description

CROSS REFERENCES TO RELATED APPLICATIONS [0001] The present application depends from Provisional Patent Application No. 60 / 423,584 entitled MEMS DRIVE STRUCTURES, by Yan et al., filed Nov. 4, 2002.TECHNICAL FIELD [0002] The present invention relates to microelectromechanical system (MEMS) devices and, more particularly, to MEMS devices with motive forces. BACKGROUND OF THE INVENTION [0003] A variety of approaches to actuating MEMS devices have been described. Some approaches use magnetic fields to pivot a moving member relative to a substrate. One such approach is described in U.S. Pat. No. 5,912,608 to Asada, entitled PLANAR TYPE ELECTROMAGNETIC ACTUATOR and U.S. Pat. No. 5,767,666 to Asada et al., entitled PLANAR TYPE ELECTROMAGNETIC ACTUATOR INCORPORATING A DISPLACEMENT DETECTION FUNCTION, each of which is incorporated herein by reference. Other approaches use electrostatic forces to pivot a moving member or to drive a sliding piece relative to a substrate. Examples of such devic...

AI Technical Summary

Problems solved by technology

This uneven spacing can cause the pixels to overlap or can leave a gap between adjacent rows of pixels.

Moreover, because the image information is typically provided as an array of data, where each location in the array corresponds to a respective position in the ideal raster pattern 70, the displaced pixel locations can cause image distortion.

Consequently, a large mirror and larger scan angle may produce unacceptable refresh rates for many MEMS scanners.

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