Heat treatable coated article with niobium nitride IR reflecting layer and method of making same
a technology of niobium nitride and reflective layer, which is applied in the direction of vacuum evaporation coating, coating, sputtering coating, etc., can solve problems such as lacking in terms, and achieve good mechanical performance, good color stability, and good corrosion resistance.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Benefits of technology
Problems solved by technology
Method used
Image
Examples
examples
[0039] The following two monolithic Example coated articles (each ultimately annealed and heat treated) were made. The Si3N4 layers 2 and 4 in each example were deposited by sputtering a silicon target (doped with Al) in an atmosphere including nitrogen gas. The niobium nitride layer 3 in each example was deposited by sputtering in an atmosphere including argon and nitrogen gas.
[0040] For Example 1, the following sputtering process parameters were used in depositing the coating. Line speed is in inches per minute (IPM):
TABLE 3Example 1 Coating Process ParametersLineArLayerPowerVoltageSpeed# PassesflowN flowSiN layer 2:2.5 kW486 V49.584055NbxNy layer 3:1.0 kW426 V3333012SiN layer 4:2.5 kW482 V49.534055
[0041] For Example 2, the following sputtering process parameters were used in depositing the coating. Again, line speed is in inches per minute (IPM):
TABLE 4Example 2 Coating Process ParametersLineArLayerPowerVoltageSpeed# PassesflowN flowSiN layer 2:1.0 kW453 V41.214055NbxNy laye...
PUM
Property | Measurement | Unit |
---|---|---|
temperatures | aaaaa | aaaaa |
thick | aaaaa | aaaaa |
thick | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com