Load sensor with use of crystal resonator
a technology of crystal resonators and load sensors, which is applied in the direction of instruments, apparatus for force/torque/work measurement, device material selection, etc., can solve the problems of reducing the q (quality factor) of the oscillator, and the inability to perform measurements with so as to achieve a high degree of accuracy and minimize the oscillation. , the effect of not reducing the q
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embodiment 1
[0028]FIGS. 1A-1C are perspective views showing a crystal resonator used in a load sensor according to Embodiment 1 of the present invention. In FIGS. 1A-1C, a long-plate shape crystal resonator 1 is an AT-cut quartz piece capable of oscillating in a thickness shear oscillation mode in a length direction of the quartz resonator 1.
[0029] Excitation electrodes 2, 2 serving as exciting means are respectively affixed to both surfaces of a central portion la of the quartz resonator 1. The central portion 1a starts the thickness shear oscillation in the length direction of the crystal resonator 1 when an electric signal is supplied to the central portion la of the crystal resonator 1 through the excitation electrodes 2, 2. It should be noted that these electrodes 2, 2 are connected to an oscillation circuit described below.
[0030] As shown in FIG. 1A, channel-shaped grooves in cross-section are respectively provided in the plate width direction on both surfaces of middle portions 1c, 1c,...
embodiment 2
[0052]FIGS. 7A and 7B are perspective views showing a constitution of a load sensor with a crystal resonator according to Embodiment 2 of the present invention. In FIG. 7A, a crystal resonator 4 is a rectangular AT-cut quartz piece and retained between rectangular parallelepiped supporting bodies 6, 6 which are respectively in contact with and pressing end faces of one end portion and the other opposing end portion thereof from the outside. The end faces are filed so as to be circular-arc-shaped in cross-section. Since the other elements are identical to those of Embodiment 1, the same or corresponding parts are denoted by the same reference numerals and as such will be not described herein.
[0053] Since the end faces of the crystal resonator 4 are circular-arc-shaped, the contacting areas with the supporting bodies 6, 6 are smaller as compared with the case where the end faces are flat. Because of this, when the crystal resonator 4 oscillates in the thickness shear oscillation mode...
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