Monolithic integrated sensor chip for measing three parameters of pressure difference, absolute pressure and temperature and its making process
A sensor chip, monolithic integration technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, semiconductor/solid-state device components, piezoelectric effect/electrostrictive or magnetostrictive motors, etc., to achieve performance Effects of stabilization, improved precision, and extended functions
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[0019] With reference to the drawings, the structure of the monolithic integrated sensor chip with three parameters of differential pressure / absolute pressure / temperature of the present invention is: adopting SOI (100) crystal plane double-polished silicon monolithic wafer, as shown in Figure 1-3, with an area of 3.5×4.0mm 2 The middle part of the substrate of the silicon sensitive chip 1 forms two relatively independent differential pressure sensitive membrane cavity areas and absolute pressure sensitive diaphragm cavity areas: one area is made of four independent P-type silicon resistors on the front side as differential pressure The sensitive resistor 5 is distributed on the differential pressure sensitive diaphragm 10 formed by anisotropic corrosion technology along the [110] crystal direction stress concentration. The thickness of the diaphragm is 10-100um. The two ends of the resistance strip of the differential pressure sensitive resistor 5 are insulated A lead hole is op...
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