Apparatus for measuring libration by optical fibre and measuring method
A vibration device and optical fiber measurement technology, which is applied in the direction of measuring devices, ultrasonic/sonic/infrasonic waves, instruments, etc., can solve the problems of interferometric optical fiber sensing system drift and susceptibility to external environment changes, etc.
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[0012] The specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings. As shown in Figure 2, after removing the coating from one end of the common single-mode optical fiber, use a fiber cutter to cut its end face perpendicular to the axis of the optical fiber. A semi-transparent and semi-reflective film (103) that can have a reflectivity of 20-40% for light in the 1550nm wave band is coated on the end face by using optical coating technology. The material and size of the micro-cantilever beam (104) can be selected and designed according to the characteristics of the vibration signal to be measured. In this embodiment, the micro-cantilever 104 is the micro-cantilever on the probe of the scanning probe microscope, the material is silicon nitride, the shape is triangular, the length is 200 microns, and the thickness is 600 nm. Under the microscope, the optical fiber and the micro-cantilever beam are al...
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