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Method for measuring minute angle based on self-commix interference of laser and apparatus thereof

A self-mixing interference and micro-angle technology, applied in the field of laser measurement, can solve the problems of low measurement accuracy and complex devices of the self-collimation method, and achieve the effect of simple structure and high measurement accuracy

Inactive Publication Date: 2007-05-16
JINAN UNIVERSITY
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Problems solved by technology

[0004] The purpose of the present invention is to provide a micro-angle measurement method based on laser self-mixing interference, which can effectively solve the problems of low measurement accuracy of the self-collimation method and complex devices of the traditional laser interferometry

Method used

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  • Method for measuring minute angle based on self-commix interference of laser and apparatus thereof
  • Method for measuring minute angle based on self-commix interference of laser and apparatus thereof
  • Method for measuring minute angle based on self-commix interference of laser and apparatus thereof

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Embodiment 1

[0029] As shown in Figure 3, the laser 1 adopts a helium-neon laser with a cavity length of 250 millimeters and an output power of 3 milliwatts; a transparent optical wedge reflector 3 is fixed on the rotary table 4, and adopting the optical wedge as the reflector can avoid the distortion of the plane reflector. The reflected light from the two surfaces is fed back into the laser cavity at the same time, so that only the reflected light from one surface can be fed back into the laser cavity. The reflectivity of the transparent wedge mirror is about 4%, forming a weak feedback mode; the laser beam deviates from the measured object by 4 The distance d=0.75mm from the angular rotation center, and the distance h=1.5cm from the wedge reflector 3 to the angular rotation center. A silicon photocell 5 is used to detect the light beam energy passing through the optical wedge. The silicon photocell 5 converts the optical signal into an electrical signal and then amplifies it through the ...

Embodiment 2

[0032] Among Fig. 5, difference with embodiment 1 is that, laser device 1 adopts the semiconductor laser device that output power is 5 milliwatts, and the distance h=3mm that laser beam deviates from measured object 4 angular rotation centers, the reflective surface of optical wedge reflector 3 The plane on which passes through the angular rotation center.

[0033] Fig. 6 is a curve of measured optical power changing with angle. In the figure, the dotted line is the curve fitting line, through which the maximum amplitude of the interference fringes can be found, and the corresponding angle here is taken as the zero reference angle for angle measurement. Through the pre-calibrated angle value corresponding to each change of a fringe period and the fringe subdivision technology, the measurement of the small rotation angle of the measured object can be realized by using Figure 6.

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Abstract

This invention relates to one micro angle measurement method and device based on laser self mixture and intervene, which comprises the following steps: sending the laser beam output by laser into reflection lens of object surface and the incidence line goes off object angle rotation center and the laser output power uses one photoelectricity detector and when the object changes by micro angle, the detector detects laser output power; the angle change leads feedback light process each length and the output laser power changes one ripe circuit and through pre-set angle and output power relationship to realize object rotation angle.

Description

technical field [0001] The invention relates to the technical field of laser measurement, in particular to a micro-angle measurement method and device based on laser self-mixing interference. Background technique [0002] Angle measurement is an important part of metrology. The measurement of tiny angles is of great significance and role in many fields such as aerospace, military, micro-electromechanical systems, precision machining, and high-precision testing. At present, the commonly used micro-angle measurement methods mainly include: optical self-collimation method, laser interferometry and so on. Each device has its own characteristics and application limitations. The autocollimation method is to optically make the object and the image respectively on the conjugate plane. When the object rotates, the image point formed by the object on the image plane also moves accordingly. By measuring the movement of the image point, the Find the angle of rotation of the object. T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26G01D5/26
Inventor 钟金钢琚志祥
Owner JINAN UNIVERSITY
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