2D levelness measuring method and apparatus thereof
A technology for levelness measurement and displacement measurement, which is used in measuring devices, height/level measurement, measuring instruments, etc., and can solve the problems of inability to achieve two-dimensional levelness measurement, high excitation current stability, and small excitation frequency drift. Reliable data, increased refraction angle, and improved measurement accuracy
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[0024] Referring to accompanying drawing 3, in this embodiment, a semiconductor laser diode 5 is used as the measuring light source, the power is <1 mW, and the laser beam is shaped and driven by the collimating optical lens 4 to form a pulsed modulation point light source with a diameter of 0.25 to 0.45 mm—— Measuring beam 6; a level sensor cavity 8 is injection-molded with black plastic, its inner cavity is a sphere with a diameter of 30mm, and its shape is a cylinder with a height of 50mm and a diameter of 40mm, and a liquid injection hole with a diameter of 1mm is designed on one side of the cylinder 12. A laser diode 5 and an optical lens 4 are installed on the bottom of the cylinder, and a spot displacement measuring device 1 is installed on the top of the cylinder. The displacement measuring device selected in this embodiment is a two-dimensional PSD position-sensitive sensor, and a four-operation anti-corrosion sensor is installed above it. Add a piece of protective gla...
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