Interference system for simultaneously measuring Faraday effect based displacement and angle

Abstract

The invention relates to an interference system based on Faraday rotation effect to measure displacement and angle at same time, wherein the crossed line polarized light of dual-frequency laser via first splitter is divided into reference and measuring beams; the reference beam via the first polarization device beat frequency to connect the first detector; the measuring beam via second splitter is divided into transmission and reflective beams; the transmission beam via one incident light feedback device based on beat Faraday rotation effect emits into the measuring mirror at the measured object; the reflective beam reflected by plane mirror emits to another incident light feedback device based on Faraday rotation effect; they will exit and emit to the same measuring mirror on the measured object; two beams emitting and exiting two incident light feedback devices based on Faraday rotation effect are parallel. The invention can realize high-accuracy large-scale displacement and angle measurements at them same, to be used in nanometer, micro photomechanical techbnique and integrated circuit chip.

Description

technical field [0001] The invention relates to a measuring device characterized by adopting an optical method, in particular to an interference system for simultaneous measurement of displacement and angle based on the Faraday rotation optical effect. Background technique [0002] High precision, wide range, and multiple degrees of freedom are always the goals pursued in the field of metrology. With the development of modern science and technology, the multi-degree-of-freedom measurement of space objects is increasingly showing urgency and importance. Fields such as coupling and multi-degree-of-freedom platforms play a very important role. Common multi-degree-of-freedom measurement methods include three-coordinate measuring machine, stereo vision six-degree-of-freedom measurement, six-degree-of-freedom measurement based on holographic lens, laser tracking measurement technology, multi-degree-of-freedom measurement based on interference technology, etc. Although these measu...

AI Technical Summary

Problems solved by technology

However, the characteristics of single-parameter measurement of this method determine that it can only perform multi-degree-of-freedom time-sharing measurement, and cannot meet the requirements of multi-degree-of-freedom dynamic real-time measurement.

Generally, three-axis CNC processing equipment needs to detect 21 error components in total, and only one error component is measured at a time of installation. The detection process is cumbersome and long

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