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Nano marking press

An embossing machine and nanotechnology, applied in printing machines, rotary printing machines, printing, etc., can solve the problems of no overlay alignment system, limited processing of single-layer nano-patterns, etc., and achieve automatic leveling and good flexibility Effect

Inactive Publication Date: 2006-05-24
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Nanoimprint lithography has been developed so far. Although characteristic patterns below 100nm can be obtained, the current nanoimprint equipment does not have an overlay alignment system or is directly equipped with a commercial lithography machine alignment device with an alignment accuracy of 1um, so it is limited to Fabrication of monolayer nanopatterns

Method used

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Experimental program
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Embodiment Construction

[0023] figure 1 , figure 2 Middle: 1-DC servo motor Z, 2-planetary gear reducer Z, 3-beam, 4-bracket, 5-fixed plate, 6-linear bearing, 7-guide rail Z, 8-rotary table, 9-X-Y thick Moving table, 10-base, 11-leveling device, 12-X-Y micro-moving table, 13-supporting plate, 14-template, 15-template clamping device, 16-transmission nut Z, 17-ball screw Z, 18-coupling Z, 19-support;

[0024] image 3 Middle: 20-stepper motor X, 21-planetary gear reducer X, 22-coupling X, 23-ball screw X, 24-linear guide X, 25-drive nut X, 26-plate X, 27- Slider X, 28-support plate, 29-Y direction coarse movement table;

[0025] Figure 4 Middle: 30-slider Y, 31-linear guide Y, 32-stepping motor Y, 33-planetary gear reducer Y, 34-coupling Y, 35-ball screw Y, 36-transmission nut Y, 37 - Tablet Y;

[0026] Figure 5 Middle: 38-cylindrical pin, 39-rotating rod, 40-first spring, 41-fixed plate, 42-a carriage, 43-pressure sensor, 44-base plate, 45-nut, 46-rotating shaft, 47-sleeve, 48-angular con...

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Abstract

The invention provides an nano imprinter, comprising an X-Y rough action work table, a leveling device, an X-Y micro action work table, a sheet bearing plate, and a rotating work table, where the X-Y rough action work table is driven by two step motors to realize the horizontal rough location of the sample on the template and sheet bearing plate, the pressure sensor in the leveling device is used to measure and control the pressure in the course of imprinting and separating so as to control a DC servo motor to drive the template to move up and down, the X-Y micro action work table is driven by two piezoelectric ceramic tubes to regulate the horizontal fine location between the template and the sample, and the rotating work table is driven two step motors to realize the fine and rough location of the corner between the template and the sample. The invention has locating and aligning precision better than 20nm and can work in two modes of cold and hot imprinting, and has better flexibility.

Description

technical field [0001] The invention relates to a manufacturing device for nanoscale structures and devices, in particular to a manufacturing device for multilayer nanoscale structures and devices. Background technique [0002] Optical lithography technology is difficult to produce patterns with line widths less than 100nm due to the limitation of light wavelength and numerical aperture, as well as the influence of scattering and interference. Although a series of difficult improvements, such as extreme ultraviolet lithography, X-ray lithography, electron beam projection, ion beam projection, micro-electron beam array, etc., can also overcome the diffraction limit caused by linewidths less than 100nm, the system Complicated and very expensive. In order to further promote the development of the semiconductor industry and nanotechnology, it is imperative to study a nanofabrication equipment that makes the process simple, low in cost and high in production efficiency. [0003...

Claims

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Application Information

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IPC IPC(8): B41M5/00B41F17/00B41F19/08B41M1/12G03F7/20
Inventor 张鸿海范细秋刘胜刘华勇贾可汪学方甘志银马斌
Owner HUAZHONG UNIV OF SCI & TECH
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