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Polishing method and device for sphere high quality large area diamond thick film

A diamond thick film, diamond film technology, applied in laser welding equipment, metal processing equipment, welding equipment and other directions, can solve the problems of easy rupture of diamond film, slow polishing rate, fatigue cracking, etc., to achieve uniform polishing, easy operation, damage small effect

Inactive Publication Date: 2005-08-17
BEIJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Diamond is the hardest material in nature. Traditional polishing methods (mechanical polishing, hot iron polishing, chemical-assisted mechanical polishing, etc.) have disadvantages such as slow polishing rate, easy crushing, and fatigue cracking.
Contact polishing requires external force on the sample, and the diamond film is easily broken under the action of external force

Method used

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  • Polishing method and device for sphere high quality large area diamond thick film

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] to combine figure 1 Laser-polished spherical high-quality diamond self-supporting films are illustrated.

[0019] 1. First, polish the growth surface of the diamond film, with the nucleation plane as the reference plane; fix the spherical diamond film with a thickness of 2mm on the arc surface polishing table that can realize three-dimensional movement with 502 glue, the arc surface of the polishing table and the diamond surface arc fit;

[0020] 2. Adjust the focal spot of the Nd:YAG laser to fall on the surface of the diamond film, and adjust the incident angle of the laser to 45°; after adjusting the swing axis to coincide with the center of the arc surface, make the polishing table rotate and swing, and use the Nd:YAG laser energy The density is 8J / cm 2 Carry out rough polishing from time to time, and adjust the height of the polishing table in due course;

[0021] 3. Measure the roughness of the diamond film; when the measured average surface roughness (Ra) is 1...

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Abstract

The present invention belongs to the field of laser micro machining. The polishing process includes first polishing of the growth surface of diamond film and the subsequent polishing of the profile surface. The polishing of the growth surface includes fixing the diamond film onto 3D arced surface polishing table with arced surface coinciding with that of the diamond film, regulating Nd:YAG laser focus and incident angle, rotating and swinging the polishing table to polish the average surface roughness Ra to 5-20 microns, polishing with ArF quasi-molecular laser for fine polishing to the average surface roughness Ra to 5-20 nm. The polishing of the profile surface is completed similarly. The present invention has less damage to the diamond film, less polishing noise, simple structure of the apparatus and easy operation.

Description

technical field [0001] The invention relates to a high-quality self-supporting diamond thick film polishing method and device, belonging to the field of laser micromachining. Background technique [0002] At present, the infrared guidance windows of domestic missiles use hot-pressed MgF in the 3-5μm band. 2 , in the 8-14μm band, hot-pressed ZnS is used, because the above materials are not suitable for higher-performance high-speed interceptor missiles due to their low strength and poor thermal conductivity. while for CO 2 For laser window materials, ZnSe windows are commonly used abroad at present, while GaAs windows are used in China. Both window materials have obvious thermal lens effects (that is, the refractive index of the material changes with temperature), because at higher output power Lower beam quality deteriorates. [0003] Among all infrared materials, diamond is the only material that combines light transmission, thermal shock resistance and high durability a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/08B23K26/36
Inventor 杨胶溪左铁钏肖荣诗
Owner BEIJING UNIV OF TECH
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