Multiple array copper-manganese thin film super high pressure transducer and method for making same

Abstract

This invention provides an array copper-manganese thin film super-high pressure sensor and its process method and its characters are that it comprises N pressure sensitive parts of array structure and thin film copper-manganese 2 and inorganic material sealed film 4 and the sensor adopts all thin film process. The sensor in this invention eliminates seal material high pressure sideway effect, which can make the sensor measurement accuracy at three to five percents and respond time reduces to twenty to forty ns. The sensor in this invention is mainly used to measure strong impact wave pressure such as in the measurement of armor or nuclear weapon explode impact wave pressure.

Description

technical field [0001] The invention belongs to the technical field of electronic components, and in particular relates to an ultra-high pressure sensor. Background technique [0002] The ultra-high pressure sensor measures the pressure by using the piezoresistive effect of the pressure-sensitive material (a relationship in which the resistance of the material changes with the pressure). Commonly used pressure sensitive materials are manganin materials. [0003] Manganese copper is a conventional ternary alloy material, the main components are 10-15% manganese, 0-4% nickel, and the rest is copper. Since the discovery of the piezoresistive effect at the beginning of last century, this material has been widely used in the measurement of static pressure. In the 1960s, it was introduced into the dynamic pressure test (Fuller P J A and Price J H. Electrical conductivity of manganin and iron at high pressures. Nature, 1962; 193(1): 262~263. Berstein D and Keough D D. Piezoresis...

AI Technical Summary

Problems solved by technology

When measuring the pressure of a large-area shock wave, it is necessary to perform multiple measurements to find the average pressure value; or use multiple pressure sensors to measure at the same time, and the measurement accuracy and accuracy of the pressure sensor are very low

Since the pressure test equipment uses a two-stage hydrogen cannon, the test cost is high

Therefore, it is not ideal to use existing sensors to measure and calculate pressure multiple times

[0005] In addition, because the packaging material used in existing sensors is an organic insulating material, its insulation performance will drop rapidly under high voltage, forming the so-called high-voltage bypass effect, which will seriously attenuate the output signal of the sensor and affect the accuracy (Vantine H , Chan J, Erickson L et al. Precision stress measurements in severe shock-wave environments with low-impendance manganin gauges. Rev. Sci. Instrum., 1980; 51(1): 116~12)

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