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Piezoelectric driving element having multilayer piezoelectric composite membrane structure

A technology of piezoelectric drive and piezoelectric composite, applied in piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric devices/electrostrictive devices, electrical components, etc., can solve the problem that the output displacement of piezoelectric film drivers is lower than Problems such as micron level and working voltage limitation achieve the effect of large output torque, improved output displacement and high reliability

Inactive Publication Date: 2005-01-12
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the end displacement of the cantilever can be increased by increasing the working voltage, for the piezoelectric micro-displacement driver integrated in the CMOS circuit, the working voltage is limited, so the output displacement of the piezoelectric film driver with this structure is generally lower than Micron level

Method used

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  • Piezoelectric driving element having multilayer piezoelectric composite membrane structure
  • Piezoelectric driving element having multilayer piezoelectric composite membrane structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Preparation of Multilayer Composite Film Si / SiO 2 / Ti / Pt / PZT / Pt / PZT / Pt / PZT / Pt / SiO 2 / Al, the thickness of each layer is 40000 / 800 / 50 / 200 / 120 / 20 / 120 / 200 / 120 / 50 / 300 / 1000 nanometers from bottom to top, and the size of the cantilever beam is 600 microns×60 microns.

Embodiment 2

[0030] Preparation of Multilayer Composite Film Si / SiO 2 / Ti / Pt / PZT / Pt / PZT / Pt / PZT / Pt / SiO 2 / Al, the thickness of each layer is 10000 / 800 / 50 / 200 / 120 / 20 / 120 / 20 / 120 / 50 / 300 / 1000 nanometers from bottom to top, and the size of the cantilever beam is 600 microns×100 microns.

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Abstract

Disclosed piezoelectric driving device belonging to MEMS device is applicable to micro displacement device, read / write head in driving arm of hard disk. Following layers are prepared on silicon substrate from bottom up by using general MEMS method: silicon substrate, thermooxidizing silicon dioxide layer, adhesion layer of metallic titanium, metal platinum layer with bottom electrode, composite layer between 1-N layer piezoelectric thin film PZT layer and metal platinum layer with inner electrode, silicon oxide layer and aluminum lead layer. Triplex layer parallel connection structure is adopted in the invention. Comparing with original structure in cantilever beam type, displacement at end part is raised three times in the invention under identical driving voltage and identical structured thickness. Or, driving voltage can be lowered to 1 / 3 of original voltage under identical displacement at end part.

Description

technical field [0001] The invention belongs to the scope of MEMS micro-driver devices, and particularly includes a piezoelectric drive device with a multi-layer piezoelectric composite film structure applied to a micro-displacement device and a drive arm of a read-write head of a computer hard disk. Background technique [0002] Piezoelectric materials have the characteristics of electromechanical coupling and can directly convert electrical energy to mechanical energy, so they are widely used in modern scientific and technological life. At present, the main products include piezoelectric ceramic transformers, piezoelectric ceramic motors, etc. The principle is to apply an electric pulse signal to the piezoelectric ceramic components, and the piezoelectric ceramics will produce mechanical deformation through the inverse piezoelectric effect, thereby outputting displacement or torque. With the development of modern electronic products in the direction of thinness, lightness,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H10N30/20H10N30/50
Inventor 张宁欣杨轶任天令刘理天
Owner TSINGHUA UNIV
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