Static microactuator with electric insulative movable portion and related driving circuit
A technology of actuators and electrical insulating materials, applied in the directions of electrostatic generators/motors, generators/motors, driving/moving recording heads, etc., which can solve the problems of increasing noise by magnetic signals
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[0025]FIG. 6 shows the microactuator 114 and its driving circuit of the present invention. Microactuator 114 has a movable frame 140 that includes a generally rectangular interior 141 and exterior 142 formed from a conductive metal, typically nickel. The two frame parts 141 and 142 are connected together but are electrically isolated from each other by an electrically insulating material 143 . The frame 140 has two opposing side walls 145, 147, each of which faces a respective set of fixed electrode branches 153, 153' spaced apart on the substrate 151 . The outer portion 142 of the frame 140 also has side walls 161, 163 which support respective sets of movable electrode branches 156, 156'. Walls 161 , 145 , and walls 163 , 147 are connected by insulating material 143 . Figure 7 is a partial view of FIG. 6 (without the optional bonding platform connected to the interior 141 of the frame 140), which more clearly shows how the slider is electrically isolated from the movable el...
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