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Magnetic suspension motion platfrom height measuring and calibrating method and apparatus thereof

A motion platform, height measurement technology, applied in measurement devices, holding devices with magnetic attraction or thrust, optical devices, etc., to achieve the effect of large movement range, high measurement accuracy, and easy installation

Inactive Publication Date: 2004-09-15
ZHEJIANG SCI-TECH UNIV
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Problems solved by technology

[0004] In order to overcome the deficiency of the real-time height measurement when the existing magnetic suspension micro-motion platform cannot move, the present invention proposes a kind of height measurement of the magnetic suspension micro-motion platform based on three Fabry-Perot (Perot) interferometers. Measuring and calibrating method and its device

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  • Magnetic suspension motion platfrom height measuring and calibrating method and apparatus thereof
  • Magnetic suspension motion platfrom height measuring and calibrating method and apparatus thereof

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Embodiment Construction

[0023] As shown in the accompanying drawings, the height measurement and correction method of the magnetic levitation micro-motion platform of the present invention and its device include a motion platform 1, a permanent magnetic array 2, three beam splitters 3, 4, 5, three bundles of optical fibers 6, 7, 8. Five beam splitters 9, 10, 11, 13, 14, mirror 12, three photodetectors 15, 16, 17, laser 18, fixed beam splitter 19, fixed winding 20. Four groups of permanent magnet arrays 2 are embedded in the symmetrical position of the center of the four sides of the bottom of the moving platform 1, and four groups of fixed windings 20 are arranged correspondingly to each group of permanent magnet arrays 2, so that the interaction of electromagnetic force between the permanent magnet array and the fixed windings is just Make the motion platform generate height (vertical) and horizontal motion. The first beam splitter 4, the second beam splitter 3, and the third beam splitter 5 are emb...

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Abstract

The invention discloses measuring and correcting method for a kind of magnetism suspending micro movement platform height and the device. It embeds four groups of permanent magnetism array symmetrically under the platform, and set four groups of mounting windings correspondent to the permanent magnetism, the interaction between the permanent magnetism array and the mounting windings, it makes the platform generate the movement in vertical and horizontal direction. A three blocks beam splitter mirror is set at the centre of the platform, and it and the a large mounting beam splitting mirror among the four groups of mounting windings make up three Fabry-Perot interferometer. The meter measures the shift in height direction. Makes the distance sbetween the three beam splitting mirror and the mounting beam splitting are equal through adjusting the magnetism force between the four permanent magnetism array and the mounting windings, it can ensure the platform moves in the horizontal direction.

Description

Technical field [0001] The invention relates to a method and device using optical and magnetic variables, in particular to a method and device for measuring and correcting the height of a magnetic suspension micro-motion platform. Background technique [0002] The micro-motion table provides one-dimensional, two-dimensional or three-dimensional nanoscale micro-motion required by nanotechnology. The rapid development of nano science and technology puts forward higher requirements for the micro-motion table, that is, the micro-motion table must not only provide a large range of motion, but also must have nano-level motion accuracy and positioning accuracy. The existing micro-motion workbench cannot satisfy the movement precision and positioning precision of the nanometer level while realizing the movement range of the millimeter level. In order to overcome the shortcomings of the existing micro-motion workbench, the magnetic levitation technology is now applied to the micro-m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B11/00G01B21/08H02N15/00
Inventor 陈本永王俊茹孙政荣吴晓维雷勇
Owner ZHEJIANG SCI-TECH UNIV
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