Multi-functional cleaning module and cleaning apparatus using the module

Abstract

The multi functional cleaning module comprises a plurality of air curtain, an eximer ultraviolet light irradiating device, a brush, a high-speed shower device, and an air knife, where they are arranged continually on a plan and the glass substrates are inserted continually into them. The cleaning apparatus using the multi functional cleaning module comprises a driving part having a loading and an unloading portions as well as the multi functional cleaning module.

Description

technical field [0001] The invention relates to a manufacturing equipment of a flat panel display, in particular to a multifunctional cleaning module whose required installation space size is reduced due to the integration of components, and a cleaning device applying the multifunctional cleaning module. Background technique [0002] Figure 1a is a block diagram of conventional cleaning equipment in flat panel display manufacturing equipment. Figure 1b is a schematic diagram of the structure. [0003] refer to Figure 1a and Figure 1b , the traditional cleaning equipment includes: a driving part with a loading part and an unloading part, with O 3 Processing part, brush part, nozzle part, and washing part of D.I. (deionized water) spray part, and drying part. [0004] The loading part of the driving part sends the glass substrate (not shown in the figure) into the cleaning apparatus, and the unloading part of the driving part sends the glass substrate out of the cleanin...

AI Technical Summary

Problems solved by technology

[0008] However, in conventional cleaning equipment, it is difficult to continuously perform the production steps including cleaning and other production steps other than the cleaning step, because the installation area of ​​the cleaning part is too large, resulting in a decrease in FAB efficiency

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