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Silicon wafer carrier

A carrier and silicon wafer technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as the cost reduction of solar power generation, and achieve the effect of firm positioning, cost saving, and less raw materials

Inactive Publication Date: 2007-03-07
BEIJING PLASTICS RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the other hand, with the rapid development of optoelectronic technology and its application materials in the world, the cost of optoelectronic materials has decreased exponentially, and the photoelectric conversion rate has continued to increase, which will bring about a substantial reduction in the cost of solar power generation.

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0040] Using PVDF injection grade (produced by Ato Company) as raw material, the shrinkage rate is 3%, and a 103mm square silicon wafer carrier mold is designed. Using Ningbo Haitian HTF 250X / 1 injection machine, the injection temperature is 190℃~220℃, the injection pressure is 45~60MPa, and the mold temperature is 80℃.

Embodiment 2

[0042] Using PVDF injection grade (produced by Ato Company) as raw material, the shrinkage rate is 3%, and a 156mm square silicon wafer carrier mold is designed. Using Ningbo Haitian HTF 250X / 1 injection machine, the injection temperature is 200℃~245℃, the injection pressure is 35~45MPa, and the mold temperature is 90℃.

Embodiment 3

[0044] Using PFA injection grade (produced by Daikin Corporation) as the raw material, the shrinkage rate is 3%, and a 156mm square silicon wafer carrier mold is designed. Using Ningbo Haitian HTF 250X / 1 injection machine, the injection temperature is 320℃~365℃, the injection pressure is 10~65MPa, and the mold temperature is 80℃.

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Abstract

The present invention relates to container for bearing silicon slice, such as silicon slice for solar cell. The silicon slice bearer can wear acid and alkali washing solution under certain temperature for long time, and has certain rigidity, precise external size and strict weight for the requirement of silicon slice producing line and washing apparatus. Structurally, the silicon slice bearer is one case with opened top and bottom, two flat inclined side walls with inside toothed bars arranged in certain intervals, one H-shaped end wall and one plate end wall. Each of the side walls has three outside horizontal beams, conic leg, horizontal bottom gaps and conic teeth, two positioning slots and square notch for clamping silicon slice protecting bars. The container is made with PVDF and through injection molding.

Description

Technical field [0001] The invention relates to the development of a container for carrying square silicon wafers, such as for carrying polycrystalline and monocrystalline silicon wafers of solar cells. The carrier (commonly known as: cleaning flower basket) required to hold the silicon wafer can not only withstand the temperature of the cleaning solution, the acid and alkali corrosion of the cleaning solution for a long time, but also have strong rigidity, precise dimensions and strict product weight. To meet the requirements of wafer production lines and cleaning equipment. Background technique [0002] The silicon wafer carriers used in the past are all used to carry semiconductor silicon wafers and wafers, and these silicon wafers are all circular. The production process requires immersion and washing of the silicon wafers in the carrier with liquid and gas. The chemical washing liquid contains corrosive liquids such as strong acid and strong alkali, and it needs to be ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/68
Inventor 孙卫东黄萍王华朱道峰
Owner BEIJING PLASTICS RES INST
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