Germanium chloride and siloxane feedstock for forming silica glass and method
A kind of technology of germanium chloride and siloxane
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[0040] use the following table figure 1 with 2 The system and apparatus shown for the preparation of GeO-doped 2 SiO 2 soot. High-purity liquid octamethylcyclotetrasiloxane containing at least 95% by weight octamethylcyclotetrasiloxane is pumped from vessel 20 into a ramped flash tank heated to a temperature above the boiling point of octamethylcyclotetrasiloxane. Steamer 26. Octamethylcyclotetrasiloxane vapor is delivered to conversion site 30 by nitrogen carrier gas from nitrogen source 28 . Feed pipes 32, 50 and 40 and pipe fittings 38 and 42 are made of stainless steel pipe. These pipes are heated to 190°C. Oxygen heated to about 200° C. is delivered by oxygen source 34 and heated tubing 36 to connection 38 . High-purity GeCl 4 The steam is mixed with octamethylcyclotetrasiloxane at feed connection 42 . GeCl 4 Steam from GeCl 4 Evaporator 44 supply. GeCl 4 The evaporator 44 consists of a GeCl 4 Bubbler. Will be packed in container 48 containing at least 99% ...
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