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Differential confocal scanning detection method with high spatial resolution

A high spatial resolution, differential confocal technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problem that the effect of three-dimensional super-resolution is not obvious, and achieve the effect of improving the axial resolution

Inactive Publication Date: 2005-07-06
HARBIN INST OF TECH
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Problems solved by technology

[0018] However, the above-mentioned three-dimensional pupil filter requires both lateral super-resolution and axial super-resolution, and the effect of three-dimensional super-resolution is not significant.

Method used

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  • Differential confocal scanning detection method with high spatial resolution
  • Differential confocal scanning detection method with high spatial resolution
  • Differential confocal scanning detection method with high spatial resolution

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Embodiment Construction

[0066] Such as figure 2 As shown, the dotted frame part is a differential confocal microscope dual receiving optical path arrangement 25, after the incident light beam is transmitted through the pupil filter 1, the polarizing beam splitter 2, and the quarter wave plate 3, the measured objective lens 4 is focused on the measured sample 12 surfaces. The measuring light reflected by the surface of the tested sample 12 is reflected by the polarizing beam splitter (PBS) 2 through the quarter-wave plate 3 again, and then divided into two beams of light by the beam splitter (BS) 5, and are respectively separated by two identical beam splitters. Condensers 6 and 7 focus. The pinhole 8 and the detector 10 are placed at the back-focus distance C of the focal plane of the condenser 6, and the pinhole 9 and the detector 11 are placed at the front-focus distance D of the focal plane of the condenser 7, and the sizes of C and D are both M, and the distance The optical normalized displace...

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Abstract

The invention belongs to the technical field of surface fine structure measurement, and relates to a differential confocal scanning detection method with high spatial resolution. This method adopts differential confocal microscope double-accepting optical path arrangement and double detector subtraction to form differential confocal signals, and measures the workpiece to be measured. The lateral resolution is improved through optical super-resolution confocal The method improves the vertical resolution, so as to achieve the high spatial resolution detection of differential confocal scanning detection. This method can meet the requirements of high spatial resolution, high precision and large measurement range, and is especially suitable for the measurement of surface three-dimensional microstructure, microsteps, microgrooves, line width and surface topography.

Description

technical field [0001] The invention belongs to the technical field of microscopic detection, and in particular provides a method for detecting surface three-dimensional microstructures, microsteps, microgrooves, integrated circuit line widths and surface topography. Background technique: [0002] With the development of semiconductor technology to VLSI, millimeter wave and quantum devices, microfabrication technology has entered the field of deep submicron and nanometer three-dimensional processing technology, so it is urgent to study large-scale, high-space (ie, axial and lateral) resolution imaging and detection technologies. [0003] In the field of detection with high spatial resolution, non-contact scanning probe detection methods will undoubtedly play a leading role. In recent years, despite the rapid development of scanning probe detection methods based on the principles of scanning tunneling, atomic force, and near-field optics, the spatial resolution of the sensor...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B11/30
Inventor 赵维谦谭久彬邱丽荣
Owner HARBIN INST OF TECH
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