Integrated circuit chip flatness detection device and method
A testing equipment and integrated circuit technology, applied in the field of integrated circuit chip flatness testing equipment, can solve problems such as low batch testing efficiency, and achieve the effects of avoiding manual cutting, compact structure and high degree of automation
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[0039] refer to Figure 1-11 , a kind of integrated circuit chip flatness detection equipment, comprises machine base 1, and the upper surface of machine base 1 is welded with column 2, and column 2 is fixedly connected with fixed block 3, and the side wall of fixed block 3 is fixedly connected with a plurality of detectors 32, as Figure 11 As shown, there are five detectors 32 evenly distributed, one of which detects the bottom surface of the chip, and the remaining four detect the four sides of the chip. Ring, the rotating block 4 is provided with a detection mechanism for flatness detection;
[0040]The detection mechanism includes a mounting groove 5 provided on the inner side wall of the rotating block 4. The mounting groove 5 is an annular groove. The gear 7 meshes, the number of teeth of the inner ring gear 8 is eight times the number of teeth of the first gear 7, and the number of teeth of the inner ring gear 8 is eight times the number of teeth of the first gear 7, ...
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