Automatic control device and method for metal coating

Abstract

The invention provides an automatic control device and method for metal coating, and the method comprises the steps: inputting the target film thickness and the initialization process parameters of a process formula into a data processing and system server through an equipment monitoring and business processing end, and predicting the output film thickness through a film thickness prediction model according to the input process parameters; and calculating an error between the predicted film thickness and input target film thickness calculation, giving optimized parameters of each process parameter according to the thickness degree of the target film thickness compared with the predicted film thickness, preset adjustment priority of each process parameter and a PID adjustment mode, iterating film thickness prediction and feedback adjustment until the final predicted film thickness is consistent with the target film thickness, and outputting the predicted film thickness and the target film thickness. And the output process parameters are transmitted to the production equipment terminal through the gateway box. According to the method, automatic film thickness control and adjustment can be achieved, the film coating efficiency can be improved, and the method can be applied to metal film coating factories and has wide application prospects in the field of universal physical vapor deposition film coating.

Description

technical field [0001] The invention relates to the field of metal coating, in particular to a metal coating automatic control device and a method thereof. Background technique [0002] Metal coating technology, especially metal coating using plasma vacuum technology, is mostly used in devices for coating metal conductive films, light reflection films and metal compound films on substrates such as semiconductor chips and optoelectronic chips. It is a metal deposition technology. With the development of technology, the current market has higher and higher requirements for the performance and appearance of metal coatings. The temperature, chamber pressure, gas flow and power during the metal coating process are important parameters that affect the coating. How to automatically adjust the process parameters to achieve the ideal film thickness, while ensuring film thickness uniformity, refractive index and other properties, improving factory production efficiency, and reducing ...

AI Technical Summary

Problems solved by technology

However, there is no method to improve the coating efficiency theoretically from the system and reaction conversion, and the optimization strategy when changing the production film thickness and formula is not given as a whole.

The patent (CN112126908A) discloses a coating control system and coating equipment. The coating control system includes an industrial computer connected to each coating equipment and a service platform deployed on a cloud server, but does not give a single process parameter and its Adjustment method under the effect of coupling relationship

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