Nanofluidic chip processing method based on carbon nanotube channel

Abstract

The invention provides a nanofluidic chip processing method based on a carbon nanotube channel. Comprising the following steps: spin-coating a thin layer of photoresist on a dewatered substrate, and heating to cure the thin layer of photoresist; transferring the carbon nanotube thin layer to a preset position on the surface of the photoresist thin layer through a heat release method; spin-coating another layer of photoresist on the surface of the photoresist thin layer to embed the carbon nanotube into the photoresist thin layer; heating to volatilize the photoresist solvent, then carrying out photoetching operation, processing an open type micron channel system on the substrate, and exposing part of the carbon nano tube in the micro-flow channel after photoetching operation; pouring liquid PDMS into the channel, embedding the carbon nanotube exposed in the channel into the PDMS, and curing and stripping the PDMS to obtain a nanofluidic chip substrate with the carbon nanotube channel; s5, performing plasma oxidation treatment on the PDMS surface, performing plasma surface oxidation treatment on the PDMS surface and the nanofluidic chip substrate of the carbon nanotube channel in S5, and finally performing chip bonding to obtain the nanofluidic chip constructed based on the carbon nanotube. The method is good in integrity and high in manufacturing efficiency.

Description

technical field [0001] The invention relates to the technical field of nanofluidic chip processing, in particular to a nanofluidic chip processing method based on low-dimensional materials such as carbon nanotube channels. Background technique [0002] Nanofluidic technology is a science that studies the transmission, manipulation and application of scale molecules, ions, particles and other substances in the nanoscale space (1-100nm). The key to the development of nanofluidic technology lies in the processing of nanofluidic chips, including the construction of nanoscale fluid control systems. The inner diameter of carbon nanotubes is controllable (tens of nanometers to several nanometers) and is comparable to the size of molecules, which provides a pole for detecting and manipulating single nanometer-sized objects, such as cations, deoxyribonucleic acid, small organic molecules and solid nanoparticles. good platform. The uniformity of carbon nanotubes can effectively prom...

AI Technical Summary

Problems solved by technology

This method can manufacture many identical chips at one time, but the disadvantage of this method is that these chips are not convenient for on-chip integration, and the inlet and outlet of the chip are on both sides of the channel, and the chip is three-dimensional, which is inconvenient to operate; manufacturing vertical carbon Another approach for nanotube channeling is to insert well-dispersed ultrashort carbon nanotubes into lipid membranes, but the ultrasonic-assisted cleavage process destroys the integrity of the carbon nanotube walls and makes the lipid layer less mechanically stable than the solid state. Devices and Epoxy Chips

Development of a planar-based carbon nanotube nanofluidic device, in which the carbon nanotubes are horizontally positioned on the substrate during the fabrication process, covered with a layer of photoresist by spin coating, and then photolithography is carried out by electron beam , but this method requires subsequent shearing of the carbon nanotubes by high-power plasma, however, the efficiency of plasma cutting carbon nanotubes or removing the caps of carbon nanotubes is not high, especially for multi-walled carbon nanotubes, shearing less effective

At the same time, although the above-mentioned nanofluidic chips based on carbon nanotubes can perform optical and electrical detection at the same time, most of the above-mentioned chips are not optically transparent, which is not convenient for optical testing requirements in special occasions

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