Space-time frequency shaping femtosecond laser hemispherical resonator gyroscope base electrode etching method

Abstract

The invention discloses a space-time frequency shaping femtosecond laser hemispherical resonator gyroscope base electrode etching method, and belongs to the technical field of femtosecond laser etching application. The system comprises a femtosecond laser processing subsystem, a pulse time shaper, a spatial light shaper, a frequency domain shaping subsystem, an imaging subsystem, a computer control system and a high-precision five-axis translation stage. According to the method, the femtosecond laser time domain is accurately modulated, material substrate ablation and thermal elastic stress are inhibited, and low-substrate-damage and low-stress machining of substrate electrode etching is achieved; through circular flat-topped light beam airspace shaping modulation, the etching edge quality of the base electrode is improved, meanwhile, base ablation is homogenized, and low-base-roughness machining of the electrode is achieved; through laser frequency doubling modulation, laser energy is mainly deposited on an electrode layer, and the substrate ablation degree in substrate electrode etching is reduced. Space-time frequency shaping femtosecond laser is adopted, high-precision, low-stress and low-damage etching of the hemispherical resonator gyroscope base electrode is achieved, and the comprehensive performance of an inertial navigation device is improved.

Description

technical field [0001] The invention relates to a hemispherical resonant gyroscope base electrode profiling method for time-space frequency shaping femtosecond laser, and belongs to the technical field of femtosecond laser profiling applications. Background technique [0002] The hemispherical resonant gyroscope is a high-precision inertial navigation device with small size, good stability and strong anti-electromagnetic interference ability. It has realized key applications in important equipment in many fields such as sea, land, air and space. At present, Northrop Grumman Company of the United States, Safran Company of France, and Laming Bureau of Russia are in the leading position in the field of manufacturing hemispherical resonant gyroscopes. The precision of hemispherical resonant gyroscopes in my country still lags behind these countries. [0003] The hemispherical resonator gyro system excites the vibration of the hemispherical resonator and detects the precession ch...

AI Technical Summary

Problems solved by technology

[0005] The main purpose of the present invention is to provide a hemispherical resonator gyro pedestal electrode profiling method and corresponding processing system with time-space frequency shaping femtosecond laser, on the basis of ensuring high-precision machining of hemispherical resonant gyroscope pedestal electrodes , which can solve the accompanying problems such as excessive substrate ablation, increased edge burrs, and increased residual thermal stress

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