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Device and method for detecting micro cylindrical lens array

A micro-cylindrical lens and detection device technology is applied in measurement devices, optical devices, and optical performance testing. Fast, period and radius of curvature accurate effects

Pending Publication Date: 2022-03-29
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Due to the small size of the microlens cylinder array, conventional interferometers for curvature radius and surface shape detection cannot be applied
The white light profiler has a small detectable range and a slow speed, and cannot detect a lens array with a large NA

Method used

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  • Device and method for detecting micro cylindrical lens array
  • Device and method for detecting micro cylindrical lens array
  • Device and method for detecting micro cylindrical lens array

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Embodiment Construction

[0044] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0045] figure 1 It is a schematic diagram of a detection device of a microcylindrical lens array of the present invention, including a microcylindrical lens array 101, a tooling 102, a rotary table 201 around the Z axis, a two-dimensional translation stage 202 along the X axis and the Y axis, Z Axial height contact measuring equipment 203, computer 204, the structure schematic diagram of its device is as figure 1shown. Wherein, the XYZ coordinate system is the coordinate system of the rotating platform 201 around the Z axis, the two-dimensional translation platform 202 along the X axis and the Y axis, and the coordinate system of the height contact measuring device 203 in the direction of the Z axis. Wherein, the rotating platform 201 around the Z axis realizes the rotation around the Z direction, and the two-dimensional translation platform ...

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Abstract

The invention discloses a micro cylindrical lens array detection device and method. The device comprises a micro cylindrical lens array (101), a tool (102), a rotary table (201) around the Z axis, a two-dimensional translation table (202) along the X axis and the Y axis, Z-axis direction height contact measurement equipment (203) and a computer (204). Through the characteristic test of the tool (102), the position of the micro cylindrical lens array (101) is accurately and quickly adjusted, and the test of the micro cylindrical lens array (101) can be accurately along the vertical direction of the generatrix. Through multi-unit combined processing of test data of the micro cylindrical lens array (101), the curvature radius, the period and the surface shape error of the micro cylindrical lens array (101) can be rapidly and accurately obtained.

Description

technical field [0001] The invention belongs to the field of optical element detection, and in particular relates to a detection device and method of a microcylindrical lens array. Background technique [0002] The microlens cylindrical array refers to the arrangement of sub-cylindrical lenses with a diameter of tens to hundreds of microns on the substrate. Microlens cylindrical arrays are widely used in laser array scanning, beam homogenization, and beam shaping systems due to their small unit size and high integration. [0003] Due to the small unit size of the microlens cylinder array, conventional interferometers for curvature radius and surface shape detection cannot be applied. The white light profiler has a small detectable range and a slow speed, and cannot detect a lens array with a large NA. Contents of the invention [0004] In order to solve the above technical problems, the present invention proposes a detection device and method for a microcylindrical lens ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02G01B11/24
CPCG01M11/025G01B11/24
Inventor 徐富超李云林妩媚谢强
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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