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Laser processing system and processing method for surface insulation structure of heterogeneous material

A laser processing method and insulation structure technology, applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problems of low processing quality of insulation structures, reduced insulation resistance of components, poor flatness of processing edges, etc., and achieve improvement Machining morphology, improving machining accuracy and quality, and ensuring consistency

Active Publication Date: 2022-03-25
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0006] The invention provides a laser processing system and processing method for a heterogeneous material surface insulation structure, which mainly solves the problem of low processing quality, damage to the processed material and poor flatness of the processing edge of the heterogeneous material insulation structure, which leads to a significant reduction in the insulation resistance of the component. and failure issues

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  • Laser processing system and processing method for surface insulation structure of heterogeneous material
  • Laser processing system and processing method for surface insulation structure of heterogeneous material

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Embodiment Construction

[0033] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention, and are not intended to limit the protection scope of the present invention.

[0034] The invention provides a laser processing system and a processing method for a heterogeneous material surface insulation structure, which are used to solve the problem of selective processing of the heterogeneous material insulation structure and improve the processing accuracy of the insulation structure. The laser processing system has high precision and stability, the width of the insulating structure can be adjusted, and the damage of the base material can be suppressed, and the edge shape of the insulating structure is smooth and has high consistency.

[0035] Such as figure 1As shown, the laser processing system f...

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Abstract

The invention provides a laser processing system and a processing method for an insulating structure on the surface of a heterogeneous material, and mainly solves the problems that the insulating structure of the heterogeneous material is low in processing quality, damages to a processing material and poorer in flatness of a processing edge, so that the insulation resistance of a component is greatly reduced and the component is invalid. The heterogeneous material surface insulation structure laser processing system comprises a femtosecond laser, a hollow motor, a coaxial visual system, and a beam expander, a first reflecting mirror, a radial polarizer, a second reflecting mirror, a third reflecting mirror, a wedge-shaped mirror, a Dove prism, a fourth reflecting mirror and a focusing mirror which are sequentially arranged on a laser output light path of the femtosecond laser; the hollow motor is used for driving the Dove prism to realize high-speed rotation; and the coaxial vision system is used for positioning and observing a processing area. The laser processing system is high in precision and stability, damage to a substrate material can be restrained, and the edge shape of an insulation structure is smooth and high in consistency.

Description

technical field [0001] The invention belongs to the field of laser processing, and in particular relates to a laser processing system and a processing method of a heterogeneous material surface insulation structure. Background technique [0002] Femtosecond laser processing technology has the characteristics of no contact stress, selective processing, high processing precision, and environmental protection, making it more and more widely used in the field of electronic manufacturing, gradually replacing the original photolithography technology and ultrasonic processing technology. An important processing technology. [0003] Chinese patent CN2016108749436 discloses a laser thin film etching device and method. The device applies laser light to a workpiece with a thin film on the surface through a scanning galvanometer and a field mirror to perform thin film etching, and at the same time sets the workpiece in a vacuum environment for processing. Prevent sediment from affectin...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/00B23K26/70
CPCB23K26/00B23K26/702
Inventor 李明李晨晨
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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