Series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform

Abstract

The invention discloses a series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform, and solves the problems that a traditional optical element adjustment platform cannot give consideration to multi-degree-of-freedom precision adjustment at the same time, and the adjustment platform is low in complexity and high in reliability. The platform comprises a supporting seat, a first-stage adjustment mechanism and a second-stage adjustment mechanism; an optical element can be driven to translate in the Z direction and rotate in the X direction and the Y direction through a first micro-nano driving assembly in the first-stage adjustment mechanism, the optical element can be driven to translate in the X direction and the Y direction through a second micro-nano driving assembly in the second-stage adjustment mechanism, and therefore multi-dimensional high-precision adjustment of the spatial position of the optical element in the optical system is achieved, and the performance index of the optical system is improved.

Description

technical field [0001] The invention relates to an adjustment platform of an optical element, in particular to a series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform. Background technique [0002] Photoelectric measurement system / equipment is an important support for national defense, scientific exploration, and social and people's livelihood, and the optical system is the eye of photoelectric measurement equipment, and its performance indicators determine the performance of photoelectric measurement system / equipment. In essence, the optical system regulates and redistributes light energy through the precise layout of different forms of optical components. The realization of its performance indicators depends on the high-precision (um, nm) spatial arrangement of optical components. [0003] The complexity and motorization of space non-cooperative targets require a relatively larger field of view of the optical system and higher stabil...

AI Technical Summary

Problems solved by technology

[0008] In order to solve the problem that the traditional optical element adjustment platform cannot take into account the precise adjustment of multiple degrees of freedom at the same time, and the adjustment platform itself has low complexity and high reliability, the present invention provides a series-parallel coupled multi-degree-of-freedom optical element precision adjustment platform

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